Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The devic ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can be used to provide heading information f ...
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mir ...
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because they can dramatically improve the thermal ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is n ...
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabricate nanogap electrodes of uniform gap-s ...