論文


Journal / Int. Conf. / Thesis

2018

  1. Yusuke Shiomi, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    High-yield bridged assembly of ssDNA-modified SWCNT using dielectrophoresis
    International Journal of Automation Technology, Vol.12, No.1, 2018, pp. 29-36.
    [abstract]
  2. Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, and Osamu Tabata
    Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs
    Small, Vol.14, Issue.1, 2018, 1702028.
    [abstract]
  3. 宇野亜季子,平井義和,土屋智由,田畑修
    静電ピストンアレイ駆動型MEMS可変形状ミラーの数理解析モデル構築
    電気学会論文誌E(センサ・マイクロマシン部門誌),Vol.138-E, No.2, 2018, pp. 66-73.
    [abstract]
    (English Translation) Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array, Electrical Engineering in Japan.  Vol. 204, Issue 2, 2018, pp. 50-60. 
    [abstract]
  4. Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film
    Applied Surface Science, Vol.443, 2018, pp.48-54.
    [abstract]
  5. Kazuma Emoto, Toshiyuki Tsuchiya, Yoshinori Takao
    Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters
    Transaction of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 16, Issue 2, 2018, pp. 110-115.
    [abstract]
  6. 稲垣達也, 朴晟洙, 山下直輝, 馬志鵬, 川合健太郎, 平井義和, 土屋智由, 田畑修
    リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明
    電気学会論文誌E(センサ・マイクロマシン部門誌),Vol.138-E, No.5, 2018, pp. 171-177.
    [abstract]
  7. Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
    Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device
    Applied Sciences, Vol. 8, Issue 6 (2018) 880.
    [abstract]
  8. Takumi Hayashi, Kenta Arima, Naoki Yamashita, Seongsu Park, Zhipeng Ma, Osamu Tabata, Kentaro Kawai
    Nanopore fabrication of two-dimensional materials on SiO2 membranes using He ion microscopy
    IEEE Transactions on Nanotechnology, Vol. 17, No.4, pp. 727-730.
    [abstract]
  9. Yuto Yamaki, Yuki Sato, Kazuhiro Izui, Takayuki Yamada, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata
    A heuristic approach for actuator layout designs in deformable mirror devices based on current value optimization
    Structural and Multidisciplinary Optimization, accepted.
    [abstract]
  10. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges
    Sensors and Materials, Vol. 30,  No.12, 2018,accepted.
    [abstract]
2017

  1. Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Measuring the influence of crossover in the radial structural and mechanical properties of DNA origami nanotube
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06GJ02.
    [abstract]
  2. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile test of a silicon microstructure fully coated with submicrometer-thick DLC film using PECVD method
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06GN01.
    [abstract]
  3. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06GF06.
    [abstract]
  4. Kaito Nakagawa, Toshiyuki Tsuchiya, Yoshinori Takao
    Microfabricated Emitter Array for an Ionic Liquid Electrospray Thruster
    Japanese Journal of Applied Physics, Vol. 56, 2017, 06GN18.
    [abstract]
  5. Hiromasa Yagyu, Jae-Young Lee, Do-Nyun Kim, Osamu Tabata
    Coarse-Grained Molecular Dynamics Model of Double-Stranded DNA for DNA Nanostructure Design
    The Journal of Physical Chemistry B, Vol. 121, 2017, pp.5033–5039.
    [abstract]
  6. Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Integrated Heart/Cancer on a Chip to Reproduce the Side Effects of Anti-Cancer Drugs in vitro
    RSC Advances, Vol. 7, 2017, pp.36777-36786.
    [abstract]
  7. Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique
    Micro & Nano Letters, Vol. 12, Issue 11, November 2017, pp. 854-859.
    [abstract]

総説

  1. 平井 義和
    MEMS研究と応用の最新動向
    表面技術, Vol.68, No.7, pp.360-366, 2017.
    [目次]

Special Issue Preface

  1. Toshiyuki Tsuchiya
    FOREWORD: Mircoporcesses and Nanotechnology
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06G001.
    [Article]
  2. Toshiyuki Tsuchiya, Satoshi Konishi
    PREFACE: Special issue on transducers and micro-nano technology
    Journal of Micromechanics and Microengineering, Vol. 27, No.7, 2017, 070301.
    [Article]
  3. Toshiyuki Tsuchiya, Norihisa Miki, Satoyuki Kawano
    Guest Editorial – Special Issue
    Micro & Nano Letters, Vol. 12, Issue 8, 2017, page: 505.
    [Article]
2016

  1. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams
    Microsystem Technologies, Vol. 22, Issue 2, pp. 379-386, .
    [abstract]
  2. Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
    J. Microelectromechanical Systems, Vol.25, No.1, 2016, pp. 188-196.
    [abstract]
  3. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Effect of Localized Laser Treatment on Fatigue Performance of Single Crystal Silicon Microstructures
    Sensors and Materials, Vol. 28,  No.2, 2016,pp. 121-129.
    [abstract]
  4. Sahour Sayed, Mohammed Gamil, Ahmed Fath El-Bab, Koichi Nakamura, Toshiyuki Tsuchiya, Osamu Tabata, Ahmed Abd El-Moneim
    Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors
    Sensor Review, Vol. 36,  Issue.2, 2016,pp. 140-147.
    [abstract]
  5. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers
    Japanese Journal of Applied Physics, Vol. 55, 2016, 06GL04
    [abstract]
  6. 加藤義基, 平井義和, 亀井謙一郎, 土屋智由, 田畑修
    3次元微細加工を応用したBody on a Chip の開発
    IEEJ Trans. SM,Vol.136-E, No.6, 2016, pp.229-236.
    [abstract]
  7. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Investigation of the self-assembly process for discrete and polymerized bivalve DNA origami structures
    IEEJ Transactions on Electrical and Electronic Engineering, Vol. 11, 2016, pp. S164-S170
    [abstract]
  8. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Crystal-orientation dependent fatigue characteristics in micrometer-sized single-crystal silicon
    Microsystems & Nanoengineering, 2, Article number: 16027 (2016).
    [abstract]
  9. Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata
    Fracture behavior of single crystal silicon with thermal oxide layer
    Engineering Fracture Mechanics, Vol. 163,  pp. 523-532 (2016).
    [abstract]
  10. Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata
    Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet
    Journal of Vacuum & Science Technology A, Vol. 34, No. 6, 061601 (2016).
    [abstract]

2015

  1. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement
    Journal of Surface Engineered Materials and Advanced Technology, Vol.5, No.1, pp.28-41, 2015.
    [abstract] [pdf]
  2. Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata
    ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
    Sensors and Actuators B: Chemical, Vol.213, pp.547-557, 2015.
    [abstract]
  3. Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure
    Japanese Journal of Applied Physics, Vol.54, No.6S1, 06FP04, 2015.
    [abstract]
  4. Koji Sugano, Akihiro Nakata, Toshiyuki Tsuchiya, Osamu Tabata
    High-speed Pulsed Mixing in a Short Distance with High-frequency Switching of Pumping from Three Inlets
    Journal of Micromechanics and Microengineering, Vol.25, 084003.
    [abstract]
  5. Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata
    Direct Measurement of Transversely Isotropic DNA Nanotube by Force-Distance Curve-Based AFM
    Micro & Nano Letters, Volume 10, Issue 10, 2015, pp.513–517.
    [abstract]kurenai
  6. 菅野公二,平岡亮二,土屋智由,田畑修
    ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価
    IEEJ Trans. SM,Vol.135-E, No. 11, 2015, pp.433-438.
    [abstract]
  7. 菅野公二, 片山拓, 土屋智由, 田畑修
    高感度表面増強ラマン分光分析に向けた マイクロ流路内粒子凝集反応解析
    IEEJ Trans. SM, Vol.135-E, No. 11, 2015, pp.474-475.
    [abstract]
  8. Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata
    Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography
    J. Microelectromechanical Systems, Vol. 24, No. 6, 2015, pp.1856-1867.
    [abstract]
  9. Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from SOI wafers
    Micro & Nano Letters, Volume 10, Issue 12, 2015, pp.678–682.
    [abstract]kurenai

Books

  1. Zhipeng Ma, Young-Joo Kim, Do-Nyun Kim, Osamu Tabata
    DNA-DNA Origami
    Encyclopedia of Polymeric Nanomaterials (Ed. S. Kobayashi and K. Müllen), pp.589-603, 2015.
    [abstract]
  2. 肥後矢吉,谷川紘,鈴木健一郎,磯野吉正,荻博次,土屋智由,石山千恵美
    小さなものをつくるためのナノ/サブミクロン評価法
    コロナ社,2015
    [目次] [amazon]

解説

  1. 土屋 智由
    シリコンの機械的信頼性
    機械の研究, Vol.67, No.3, pp.183-190, 2015.
    [目次]
2014

  1. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Effects of etching surface roughness on the fatigue characteristics of single-crystal silicon
    IEEJ Trans. SM, Vol.134-E, No.2, pp. 32-37, 2014.
    [abstract]
  2. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Analytical investigation of the feasibility of sacrificial microchannel sealing for chip-scale atomic magnetometers
    Microsystem Technologies, Vol.20, No.3, pp.357-365, 2014.
    [abstract]kurenai
  3. Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators
    Microsystem Technologies, Vol.20, No.3, pp.403-411, 2014.
    [abstract]
  4. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
    Japanese Journal of Applied Physics, Vol.53, No.6S, 06JM03, 2014.
    [abstract]
  5. Mohammed Gamil, Osamu Tabata, Koichi Nakamura, Ahmed M.R. Fath El-Bab, Ahmed Abd El-Moneim
    Investigation of a new high sensitive micro-electromechanical strain gauge sensor based on graphene piezoresistivity
    Key Engineering Materials, Vol.605, pp.207-210, 2014.
    [abstract]
  6. Mohammed Gamil, Hassan Nageh, Ingy Bkrey, Sahour Sayed, Ahmed M. R. Fath El-Bab, Koichi Nakamura, Osamu Tabata, Ahmed Abd El-Moneim
    Graphene-based strain gauge on a flexible substrate
    Sensors and Materials, Vol.26, No.9, pp.699-709, 2014.
    [abstract]
  7. Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes
    IEEJ Trans. SM, Vol.134-E, No.12, pp.392-399, 2014.
    [abstract]
2013

  1. Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro, Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
    Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependency on humidity
    Journal of Micromechanics and Microengineering, Vol.23, No.3, 035032, 2013.
    [abstract]
  2. Ken-ichiro Kamei, Yoshikazu Hirai, Momoko Yoshioka, Yoshihide Makino, Qinghua Yuan, Minako Nakajima, Yong Chen, Osamu Tabata
    Phenotypic and transcriptional modulation of human pluripotent stem cells induced by nano/microfabrication materials
    Advanced Healthcare Materials, Vol.2, No.2, pp.287-291, 2013.
    [abstract]
  3. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
    (Translated from Denki Gakkai Ronbunshi, Vol.131-E, No.7, pp.251-257, 2011)
    Electronics and Communications in Japan, Vol.96, No.5, pp.58-66, 2013.
    [abstract]
  4. 平井義和, 柳生裕聖, 牧野圭秀, 上杉晃生, 菅野公二, 土屋智由, 田畑修
    MEMSネガレジストの粗視化分子動力学シミュレーション
    IEEJ Trans. SM, Vol.133-E, No.8, pp.320-329, 2013.
    [abstract]
  5. 上杉晃生,平井義和,菅野公二,土屋智由,田畑修
    (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響
    日本機械学会論文集A編,Vol.79, No.804, pp.1191-1200, 2013.
    [abstract]
  6. Longhai Li, Xiaojun Tian, Zaili Dong, Lianqing Liu, Osamu Tabata, Wen J. Li
    Manipulation of DNA origami nanotubes in liquid using programmable tapping-mode atomic force microscopy
    Micro & Nano Letters, Vol.8, No.10, pp.641-645, 2013.
    [abstract]
  7. Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata
    On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet
    Journal of Micromechanics and Microengineering, Vol.23, No.11, 115003, 2013.
    [abstract]

Review article

  1. Ken-ichiro Kamei, Yoshikazu Hirai, Osamu Tabata
    Body on a Chip : Re-creation of a living system in vitro
    IEEE Nanotechnology Magazine, Vol.7, Issue 3, pp.6-14, 2013.
    [abstract]
2012

  1. 片岡達哉,平井義和,菅野公二,土屋智由,田畑修
    誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング
    IEEJ Trans. SM, Vol.132-E, No.5, pp.108-113, 2012.
    [abstract]
  2. Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata
    Electrostatic tensile testing device with nanonewton and nanometer resolution and its application to C60 nanowire testing
    Journal of Microelectromechanical Systems, Vol.21, No.3, pp.523-529, 2012.
    [abstract]
  3. Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying-Khai Teh, Ying-Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata
    Improved designs for an electrothermal in-plane microactuator
    Journal of Microelectromechanical Systems, Vol.21, No.3, pp.586-595, 2012.
    [abstract]
  4. Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Micromachined tactile sensor for soft-tissue compliance detection Journal of Microelectromechanical Systems, Vol.21, No.3, pp.635-645, 2012.
    [abstract]
  5. Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes
    Microsystem Technologies, Vol.18, No.6, pp.797-803, 2012.
    [abstract]
  6. 種村友貴, 山下秀一, 和戸弘幸, 竹内幸裕, 土屋智由, 田畑修
    多結晶シリコン薄膜の面外曲げ共振振動を用いたメンブレンの信頼性試験
    IEEJ Trans. SM, Vol.132-E, No.7, pp.224-229, 2012.
    [abstract]
  7. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Low-cycle to ultra-high-cycle fatigue lifetime measurement of single crystal silicon specimens using a microresonator test device
    Journal of Microelectromechanical Systems, Vol.21, No.4, pp.830-839, 2012.
    [abstract]
  8. 上杉晃生,平井義和,菅野公二,土屋智由,田畑修
    加工条件の異なる(110)単結晶シリコン薄膜の引張試験
    IEEJ Trans. SM,Vol.132-E, No.9, pp.320-321, 2012.
    [abstract] [direct link]
  9. Takashi Sumigawa, Kenta Matsumoto, Toshiyuki Tsuchiya, Takayuki Kitamura
    Fatigue of 1 μm-scale gold by vibration with reduced resonant frequency
    Materials Science and Engineering: A, Vol.556, pp. 429-436, 2012.
    [abstract]
  10. Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro, Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
    Fatigue testing of polycrystalline silicon thin-film membrane using out-of-plane bending vibration
    Japanese Journal of Applied Physics, Vol.51, No.11S, 11PA02, 2012.
    [abstract]
  11. Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
    Polymer, Vol.53, No.21, pp.4834-4842, 2012.
    [abstract]

Book chapter

  1. Toshiyuki Tsuchiya, HIroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
    S. Mir, C.-Y. Tsui; R. Reis, O. C. S. Choy, (Eds.) VLSI-SoC: The Advanced Research for Systems on Chip, Springer, Boston, pp. 94-109.
    [abstract]
  2. 佐藤一雄,土屋智由
    シリコンの破壊と疲労(第1編 第12章 3節)
    服部敏雄他編:破壊力学大系,エヌ・ティー・エス,東京,2012,pp.211-219.
2011

  1. Mi Li, Lianqing Liu, Ning Xi, Yuechao Wang, Zaili Dong, Osamu Tabata, Xiubin Xiao, Weijing Zhang
    Imaging and measuring the rituximab-induced changes of mechanical properties in B-lymphoma cells using atomic force microscopy
    Biochemical and Biophysical Research Communications, Vol.404, Issue 2, pp.689-694, 2011.
    [abstract]
  2. Masashi Sato, Shogo Tsuda, Isaku Kanno, Hidetoshi Kotera, Osamu Tabata
    Development of piezoelectric MEMS deformable mirror
    Microsystem Technologies, Vol.17, No.5-7, pp.931-935, 2011.
    [abstract]
  3. 辻本和也,平井義和,菅野公二,土屋智由,田畑修
    チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術
    IEEJ Trans. SM, Vol.131-E, No.7, pp.251-257, 2011.
    [abstract]
  4. Wen-Ming Zhang, Osamu Tabata, Toshiyuki Tsuchiya, Guang Meng
    Noise-induced chaos in the electrostatically actuated
    MEMS resonators Physics Letters A, Vol. 375, No.32, pp.2903-2910, 2011.
    [abstract]
  5. Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata
    Fabrication of gold nanoparticle pattern using combination of self-assembly and two-step transfer
    Sensors and Materials, Vol.23, No.5, pp.263-275, 2011.
    [abstract]
2010

  1. Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata
    Tensile testing of single crystal silicon thin films at 600°C using IR heating
    Sensors and Materials, Vol.22, No.1, pp.1-12, 2010.
    [abstract]
  2. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Development of amplitude-controlled, parallel fatigue-test system for micro-electro-mechanical resonators
    Sensors and Materials, Vol.22 No.1, pp.39-50, 2010.
    [abstract]
  3. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens
    Micro & Nano Letters, Vol.5, No.1, pp.49-52, 2010.
    [abstract]
  4. Toshiyuki Tsuchiya, Yusuke Yamaji, Koji Sugano, Osamu Tabata
    Tensile and tensile-mode fatigue testing of microscale specimens in constant humidity environment
    Experimental Mechanics, Vol.50, No.4, pp.509-516, 2010.
    [abstract20130502140320
  5. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    A three-dimensional microstructuring technique exploiting the positive photoresist property
    Journal of Micromechanics and Microengineering, Vol.20, No.6, 065005, 2010.
    [abstract]
  6. 菅野公二,内田雄喜,土屋智由,田畑修
    混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ
    IEEJ Trans. SM, Vol.130-E, No.7, pp.292-299, 2010.
    [abstract]
  7. 徳崎裕幸,平井義和,菅野公二,土屋智由,田畑修
    自己変位検出機能を有する面内2自由度静電櫛歯トランスデューサの等価回路
    IEEJ Trans. SM, Vol.130-E, No.9, pp.443-449, 2010.
    [abstract]
  8. 山田崇恭,泉井一浩,西脇眞二,佐藤政司,田畑修
    静電容量型超音波トランスデューサの最適構造設計法(レベルセット法に基づく等断面形状制約付きトポロジー最適化)
    日本機械学会論文集A編, Vol.76, No.771, pp.1403-1411, 2010.
    kurenai
  9. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist
    Journal of Microelectromechanical Systems, Vol.19, No.5, pp.1058-1069, 2010.
    [abstract]
  10. Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata
    Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system
    Microfluidics and Nanofluidics Vol.9 No.6, pp.1165-1174, 2010.
    [abstract]kurenai

Review article

  1. 土屋智由
    マイクロ・ナノ材料の試験方法 (連載講義:材料試験(13))
    塑性と加工(日本塑性加工学会誌), Vol.51, No.11, pp.1048-1052, 2010.
  2. Osamu Tabata
    A Closer Look at DNA Nanotechnology
    IEEE Nanotechnology Magazine, Vol.4, No.4, pp.13-17, 2010.
    [abstract] [download]
2009

  1. Toshiyuki Tsuchiya, Tomoya Jomori, Yasutake Ura, Koji Sugano, Osamu Tabata
    Free-standing C60 nanowire fabricated using XeF2 sacrificial dry etching
    Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol.8, No.1, 013020, 2009.
    [abstract]
  2. Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata
    Design and fabrication of a differential capacitive three-axis SOI accelerometer using vertical comb electrodes
    IEEJ Transactions on Electrical and Electronic Engineering, Vol.4, No.3, pp.345-351, 2009.
    [abstract]
  3. Nobuyo Fujiwara, Kazuo Asaumi, Yasuroh Iriye, Tomoyuki Koike, Toshiyuki Tsuchiya, Gen Hashiguchi Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit IEEJ Transactions on Electrical and Electronic Engineering, Vol.4, No.3, pp.352-357, 2009.
    [abstract]
  4. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Effects of anisotropic elasticity on stress concentration in micromechanical structures fabricated on (001) single-crystal silicon flms
    Journal of Applied Physics, Vol.105, 093524, 2009.
    [abstract]
  5. Yuuki Nishimori, Hideta Ooiso, Shunsuke Mochizuki, Nobuyo Fujiwara, Toshiyuki Tsuchiya, Gen Hashiguchi
    A multiple degrees of freedom equivalent circuit for a comb-drive actuator
    Japanese Journal of Applied Physics, Vol.48, No.12R, 124504, 2009.
    [abstract]
2008

  1. 日下部達哉,種村友貴,樋口雄一,菅野公二,土屋智由,田畑修
    DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル
    粉体工学会誌, Vol.45, No.3, pp.156-161, 2008.
    [abstract]
  2. Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata and Toshiyuki Tsuchiya
    Mechanical calibration of MEMS springs with sub-micro-Newton force resolution
    Sensors and Actuators A: Physical, Vol.143, No.1, pp.136-142, 2008.
    [abstract]
  3. 吉川弥,篠部晃生,菅野公二,土屋智由,石田章,田畑修
    超小型触覚ディスプレイ用垂直駆動SMA薄膜アクチュエータの設計
    IEEJ Trans. SM, Vol.128-E, No.4, pp.151-160, 2008.
    [abstract]
  4. Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata
    Design of soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron
    IEEJ Transactions on Electrical and Electronic Engineering, Vol.3, No.3, pp.268-273, 2008.
    [abstract]
  5. Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam
    Design and simulation of a tactile sensor for soft-tissue
    IEEJ Trans. SM, Vol.128-E, No.5, pp.186-192, 2008.
    [abstract]
  6. Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara
    Air damping in a fan-shaped rotational resonator with comb electrodes
    IEEJ Trans. SM, Vol.128-E, No.5, pp.203-208, 2008.
    [abstract]
  7. Hiromasa Yagyu, Osamu Tabata
    Three-dimensional simulation of powder blasting with polymer mask using cellular automation
    Journal of Micromechanics and Microengineering, Vol.18, No.5, 055010, 2008.
    [abstract]
  8. Masaharu Komori, Hiroyuki Uchiyama, Hiromichi Takebe, Takahisa Kusuura, Kazutoshi Kobayashi, Hideyuki Kuwahara, Toshiyuki Tsuchiya
    Micro/nanoimprinting of glass under high temperature using CVD diamond mold
    Journal of Micromechanics and Microengineering, Vol.18, No.6, 065013, 2008.
    [abstract]
  9. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens
    Journal of Micromechanics and Microengineering, Vol.18, No.7, 075004, 2008.
    [abstract]
  10. Hiromasa Yagyu, Osamu Tabata
    The effect of polymer matrix on laser microfabrication of Au nanoparticles dispersed polymer resists
    Applied Surface Science, Vol.255, Issue 5, pp.2237-2243, 2008.
    [abstract]
  11. Osamu Tabata
    Micro/Nano Assembly as a Key to SENS (Synthetic Engineering for Nano Systems)
    ECS Transactions, Vol.16, Issue 15, pp.49-64, 2008.
    [abstract]
2007

  1. Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Moving mask UV lithography for three-dimensional structuring
    Journal of Micromechanics and Microengineering, Vol.17, No.2, pp.199-206, 2007.
    [abstarct]
  2. Hiromasa Yagyu, Osamu Tabata
    Cellular automaton simulation of micropowder blasting with mask erosion
    IEEJ Transactions on Electrical and Electronic Engineering, Vol.2, No.3, pp.348-356, 2007.
    [abstract]
  3. 樋口雄一,菅野公二,土屋智由,田畑修
    2種類の液滴の界面張力を用いた逐次積層セルフアセンブル
    IEEJ Trans. SM, Vol.127-E, No.4, pp.214-220, 2007.
    [abstract]
  4. Ahmed M. R. Fath El-Bab, M.E.H. Eltaib, Mohamed M. Sallam, Osamu Tabata
    A tactile sensor for compliance detection
    Sensors and Materials, Vol.19, No. 3, pp.165-177, 2007.
    [abstract]
  5. Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer
    Journal of Microelectromechanical Systems, Vol.16, No.3, pp.746-752, 2007.
    [abstract]
  6. Akira Ishida, Morio Sato, Wataru Yoshikawa, Osamu Tabata
    Graphical design for thin-film SMA microactuators
    Smart Materials and Structures, Vol.16, No.5, pp.1672-1677, 2007
    [abstract]
  7. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system
    IEICE Electronic Express, Vol.4, No.9, pp.288-293, 2007.
    [abstract]
2006

  1. Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata
    Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
    Journal of Microelectromechanical Systems, Vol.15, No.1, pp.159-168, 2006.
    [abstract]
  2. Hiromasa Yagyu, Shigehiko Hayashi, Osamu Tabata
    Fabrication of plastic micro tip array using laser micromachining of nanoparticles dispersed polymer and micromolding
    IEEJ Trans. SM, Vol.126-E, No.1, pp.7-13, 2006.
    [abstract]
  3. Yushi Nakamura, Osamu Tabata
    Moving mask direct photo-etching (M2DPE) for 3D micromachining of polytetrafluoroethylene
    IEEJ Trans. SM, Vol.126-E, No.9, pp.499-503, 2006.
    [abstract]
  4. Fuquan Dang, Kazuaki Kakehi, Jingjun Cheng, Osamu Tabata, Masaya Kurokawa, Kazuki Nakajima, Mitsuru Ishikawa, Yoshinobu Baba
    Hybrid dynamic coating with n-Dodecyl β-D-Maltoside and Methyl Cellulose for high-performance carbohydrate analysis on Poly(methyl methacrylate) chips
    Analytical Chemistry, Vol.78, No.5, pp.1452-1458, 2006.
    [abstract]
  5. Yoshikazu Hirai, Naoki Matsuzuka, Osamu Tabata
    Effective 3-D process modeling and parameters determination on double exposure in deep X-ray lithography
    Memoirs of SR Center, No.8, pp.45-54, 2006.
2005

  1. Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba, Ryujiro Udo, Yuji Yoshitomi, Taeko Ando, Kazuo Sato, Kazuki Takashima, Yakichi Higo, Yasunori Saotome, Hirofumi Ogawa, Koichi Ozaki
    Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
    Journal of Microelectromechanical Systems, Vol.14, No.5, pp.1178-1186, 2005.
    [abstract]
  2. Hiromasa Yagyu, Koji Sugano, Shigehiko Hayashi, Osamu Tabata
    Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip
    Journal of Micromechanics and Microengineering, Vol.15, No.6, pp.1236-1241, 2005.
    [abstract]
  3. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
    A novel fabrication process of 3D microstructures by double exposure in deep X-ray lithography (D2XRL)
    Journal of Micromechanics and Microengineering, Vol.15, No.11, pp.2056-2062, 2005.
    [abstract]
  4. Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba
    Young’s modulus, fracture strain, and tensile strength of sputtered titanium thin films
    Thin Solid Films, Vol.484, No.1-2, pp.245-250, 2005.
    [abstract]
  5. Akira Ishida, Morio Sato, Osamu Tabata, Wataru Yoshikawa
    Shape memory thin films formed with carrousel-type magnetron sputtering apparatus
    Smart Materials and Structures, Vol.14, No.5, S216-S222.
    [abstract]
  6. Naoki Matsuzuka, Osamu Tabata
    Algorithm to derive optimal mask and movement patterns in moving mask deep X-ray lithography (M2DXL)
    IEEJ Trans. SM, Vol.125-E, No.5, pp.222-228, 2005.
    [abstract]
  7. Toshiyuki Tsuchiya
    Tensile testing of silicon thin films
    Fatigue & Fracture of Engineering Materials & Structures, Vol.28, No.8, pp.665-674, 2005.
    [abstract]
  8. Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata
    Process simulation of moving mask deep X-ray lithography
    Memoirs of SR Center, No.7, pp.83-94, 2005.
2004

  1. Hiromasa Yagyu, Shigehiko Hayashi, Osamu Tabata
    Application of nanoparticles dispersed polymer to micropowder blasting mask Journal of
    Microelectromechanical Systems, Vol.13, No.1, pp.1-6, 2004.
    [abstract]
  2. Toshiyuki Tsuchiya, Hirofumi Funabashi
    A z-axis differential capacitive SOI accelerometer with vertical comb electrodes
    Sensors and Actuators A: Physical, Vol.116, No.3, pp.378-383, 2004.
    [abstract]
  3. Takamitsu Kakinaga, Osamu Tabata, Noriaki Baba, Yoshitada Isono, Jan G. Korvink, K. H. Ehrmann
    Simulation of anisotropic chemical etching of single crystalline silicon using cellular-automata
    IEEJ Trans. SM, Vol.124-E, No.1, pp.7-13, 2004.
    [abstract]
  4. Fuquan Dang, Osamu Tabata, Masaya Kurokawa, Ashraf A. Ewis, Lihua Zhang, Yoshihisa Yamaoka, Shouji Shinohara, Yasuo Shinohara, Mitsuru Ishikawa, Yoshinobu Baba
    High-performance genetic analysis on microfabricated capillary array electrophoresis plastic chips fabricated by injection molding
    Analytical Chemistry, Vol.77, No.7, pp.2140-2146, 2004.
    [abstract]
  5. Fuquan Dang, Shouji Shinohara, Osamu Tabata, Yoshihisa Yamaoka, Masaya Kurokawa, Yasuo Shinohara, Mitsuru Ishikawa, Yoshinobu Baba
    Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method
    Lab on a Chip, Vol.5, No.4, pp.472-478, 2005.
    [abstract]
  6. Hui You, Shouji Shinohara, Knnichi Enami, Shinsuke Shibata, Osamu Tabata, Haruki Shiraishi, Masanori Ueda, Yoshinobu Baba
    Micro capillary array electrophoresis chip by moving mask LIGA technology
    International Journal of Information Acquisition, Vol.1, No.1, pp.39-46, 2004.
    [abstract]
  7. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata
    3-D microfabrication process by double exposure method in standard X-ray lithography
    Memoirs of SR Center, No.6, pp.93-102, 2004.
  8. Yushi Nakamura, Osamu Tabata
    Moving mask direct photo-etching (M2DPE) for 3D micromachining of polytetrafluoroethylene
    Memoirs of SR Center, No.6, pp.103-116, 2004.
2003

  1. 平井義和,Sadik Hafizovic,Jan G. Korvink,田畑修
    X線応用3次元加工用シミュレーションシステムの開発
    IEEJ Trans. SM, Vol.123-E, No.9, pp.368-375, 2003.
    [abstract]
  2. 柳生裕聖,林茂彦,田畑修
    ナノ粒子分散ポリマーを用いたレーザー微細加工技術
    IEEJ Trans. SM, Vol.123-E, No.10, pp.429-435, 2003.
    [abstract]
  3. 川村貞夫,山本貴志,石田大二郎,中山雄一郎,田畑修
    ウエアラブル可変剛性要素の開発
    日本機械学会論文集C編, Vol.69, No.688, pp.182-187, 2003.
    [abstract]
  4. Naoki Matsuzuka, Osamu Tabata
    Algorithm for analyzing optimal mask movement pattern in moving mask deep X-ray lithography (M2DXL)
    Memoirs of SR Center, No.5, pp.71-82, 2003.

2002

  1. Koji Sugano, Osamu Tabata
    Reduction of surface roughness and aperture size effect for etching of Si with XeF2
    Journal of Micromechanics and Microengineering, Vol.12, No.6, pp.911-916, 2002.
    [abstract]
  2. Osamu Tabata, Hiroshi Hirasawa, Shintaro Aoki, Ryo Yoshida, Etsuo Kokufuta
    Ciliary motion actuator using self-oscillating gel
    Sensors and Actuators A: Physical, Vol.95, No.2-3, pp.234-238, 2002.
    [abstract]
  3. Osamu Tabata, Hui You, Naoki Matsuzuka, Tadahiro Yamaji, Suguru Uemura, Issei Dama
    Moving mask deep X-ray lithography system with multi stage for 3-D microfabrication
    Microsystem Technologies, Vol.8, No.2-3, pp.93-98, 2002.
    [abstract]
  4. Koji Sugano, Osamu Tabata
    Effect of aperture size and pressure on XeF2 etching of silicon
    Microsystem Technologies, Vol.9, No.1, pp.11-16, 2002.
    [abstract]
  5. Hui You, Naoki Matsuzuka, Tadahiro Yamaji, Osamu Tabata
    Deep X-ray exposure system with multistage for 3-D microfabrication
    Journal of Micromechatronics, Vol.2, No.1, pp.1-11, 2002.
    [abstract]
  6. Osamu Tabata, Naoki Matsuzuka, Tadahiro Yamaji, Suguru Uemura
    3D fabrication by moving mask deep X-ray lithography (M2DXL) with multiple stages
    Memoirs of SR Center, No.4, pp.75-84, 2002.

2001

  1. Osamu Tabata, Satoshi Konishi, Pierre Cusin, Yuichi Ito, Fumie Kawai, Shinichi Hirai, Sadao Kawamura
    Micro fabricated tunable bending stiffness device
    Sensors and Actuators A: Physical, Vol.89, No.1-2, pp.119-123, 2001.
    [abstract]
  2. Osamu Tabata
    Anisotropic etching of silicon in TMAH solution
    Sensors and Materials, Vol.13, No.5, pp.271-283, 2001.
    [abstract]
  3. Koji Sugano, Osamu Tabata
    Selectivity control of mask material for XeF2 etching using UV light exposure
    IEEJ Trans. SM, Vol.121-E, No.12, pp.647-651, 2001.
    [abstract]
  4. Hui You, Naoki Matsuzuka, Tadahiro Yamaji, Suguru Uemura, Issei Dama, Osamu Tabata
    Deep X-ray exposure system with multistage for 3-D microfabrication
    Memoirs of SR Center, No.3, pp.135-146, 2001.
2000

  1. Osamu Tabata, Kouichi Terasoma, Norihiro Agawa, Kouji Yamamoto
    3-dimensional microstructure fabrication using multiple moving mask deep X-ray lithography process
    IEEJ Trans. SM, Vol.120-E, No.7, pp.321-326, 2000.
    [abstract]
  2. Osmsu Tabata, Manabu Yashima, Tetsuo Yoshioka, Kazuo Sato
    Effect of potassium ion on anisotropy of TMAH
    IEEJ Trans. SM, Vol.120-E, No.7, pp.327-332, 2000.
    [abstract]
  3. Masanori Ueda, Hiroaki Nakanishi, Osamu Tabata, Yoshinobu Baba
    Imaging of a band for DNA fragment migrating in microchannel on integrated microchip
    Materials Science and Engineering C, Vol.12, No.1-2, pp.33-36, 2000.
    [abstract]
  4. 白石晴樹,川中智司,松田十四夫,田畑修,池田重良
    感光性エポキシ樹脂をエッチングマスクとして用いる電気泳動マイクロチャネルチップの作製
    分析化学, Vol.49, No.12, pp.1037-1041, 2000.
    [abstract]

1999

  1. Osamu Tabata, Takeshi Yamamoto
    Two-axis detection resonant acceleration based on rigidity change
    Sensors and Actuators A: Physical, Vol.75, No.1, pp.53-59, 1999.
    [abstract]
  2. Hiroshi Ueno, Makoto Hosaka, Osamu Tabata, Satoshi Konishi, Susumu Sugiyama
    X-ray mask with SiC membrane for LIGA process
    IEEJ Trans. SM, Vol.119-E, No.4, pp.229-235, 1999.
    [abstract]
  3. Masanori Ueda, Osamu Tabata, Yoshinobu Baba
    Development of microfabricated capillary array electrophoresis chip and direct observation of dynamics of DNA molecules migrating in microchannels
    IEEJ Trans. SM, Vol.119-E, No.10, pp.460-463, 1999.
    [abstract]
  4. 藤江孝行,寺杣幸一,田畑修,馬場嘉信
    X線照射を用いたマイクロキャピラリ用傾斜側壁の加工技術
    IEEJ Trans. SM, Vol.119-E, No.10, pp.482-488, 1999.
    [abstract]
  5. Hiroshi Ueno, Makoto Hosaka, Osamu Tabata, Satoshi Konishi, Susumu Sugiyama
    X-ray mask with SiC membrane for LIGA process
    Memoirs of SR Center, No.1, 1999.

1998

  1. Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata, Yasunori Taga
    Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
    Journal of Microelectromechinical Systems, Vol.7, No.1, pp.106-113, 1998.
    [abstract]
  2. Norio Fujitsuka, Jiro Sakata, Yukio Miyachi, Kentarou Mizuno, Kazuo Ootsuka, Yasunori Taga, Osamu Tabata
    Monolithic pyroelectric infrared image sensor using PVDF thin film
    Sensors and Actuators A: Physical, Vol.66, No.1-3, pp.237-243, 1998.
    [abstract]
  3. Susumu Sugiyama, Y. Zhang, Makoto Hosaka, Hiroshi Ueno, Osamu Tabata, Satoshi Konishi, Ryuutarou Maeda
    Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline
    Microsystem Technologies, Vol.4, No.2, pp.61-63, 1998.
    [abstract]
  4. Osamu Tabata
    CAD for silicon anisotropic etching -Efffects of etching products and diffusion-
    Sensors and Materials, Vol.10, No.7, pp.425-433, 1998.
    [abstract]
  5. Osamu Tabata
    SiO2 etching rate control of TMAH
    IEEJ Trans. SM, Vol.118-E, No.5, pp.278-279, 1998.
    [abstract]
  6. Yoshiteru Omura, Yutaka Nonomura, Osamu Tabata
    A surface micromachined resonant accelerometer based on rigidity change
    IEEJ Trans. SM, Vol.118-E, No.9, pp.413-419, 1998.
    [abstract]

1997

  1. Shuji Koga, Akira Yamasawa, Shoji Kawahito, Yoshiaki Tadokoro, Kentaro Mizuno, Osamu Tabata
    Micro fluxgate magnetic sensor interface circuits using ΔΣ modulation
    IEEJ Trans. SM, Vol.117-E, No.2, pp.84-88, 1997.
    [abstract]
  2. Norio Fujitsuka, Jiro Sakata, Yukio Miyachi, Kentarou Mizuno, Kazuo Ootsuka, Yasunori Taga, Osamu Tabata
    Monolithic pyroelectric infrared image sensor using PVDF thin film
    IEEJ Trans. SM, Vol.117-E, No.12, pp.607-611, 1997.
    [abstract]
  3. 内藤隆,山田日出夫,田畑修,村瀬英寿
    平板に衝突する渦輪の実験(壁面に与える力の考察)
    ながれ, Vol.16, No.1, pp.68-76, 1997.
    [abstract]

1996

  1. Osamu Tabata
    pH-controlled TMAH etchants for silicon micromachining
    Sensors and Actuators A: Physical, Vol.53, No.1-3, pp.335-339, 1996.
    [abstract]
  2. Osamu Tabata, Keiichi Shimaoka, Ryouji Asahi, Susumu Sugiyama
    Micromachined sensors using polysilicon sacrificial layer etching technology
    Sensors and Materials, Vol.8, No.1, pp.57-67, 1996.
    [abstract]
  3. Osamu Tabata, Toshiyuki Tsuchiya
    Poisson’s ratio evaluation of LPCVD silicon nitride film
    IEEJ Trans. SM, Vol.116-E, No.1, pp.34-35, 1996.
    [abstract]
  4. 田畑修,島岡敬一
    薄膜ダイヤフラムを有するマイクロ圧力センサの感度解析
    IEEJ Trans. SM, Vol.116-E, No.4, pp.149-155, 1996.
    [abstract]
  5. Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata, Yasunori Taga
    Tensile testing of polycrystalline silicon thin films using electrostatic force grip
    IEEJ Trans. SM, Vol.116-E, No.10, pp.441-446, 1996.
    [abstract]
1993

  1. Susumu Sugiyama, Keiichi Shimaoka, Osamu Tabata
    Surface-micromachined microdiaphragm pressure sensors
    Sensors and Materials, Vol.4, No.5, pp.265-275, 1993.
    [abstract]

1992

  1. Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi, Keiichi Shimaoka, Susumu Sugiyama
    Anisotropic etching of silicon in TMAH solutions
    Sensors and Actuators A: Physical, Vol.34, No.1, pp.51-57, 1992.
    [abstract]
  2. Tomio Nagata, Hiroaki Terabe, Sirou Kuwahara, Sizuki Sakurai, Osamu Tabata, Susumu Sugiyama, Masayoshi Esashi
    Digital compensated capacitive pressure sensor using CMOS echnology for low pressure measurements
    Sensors and Actuators A: Physical, Vol.34, No.2, pp.173-177, 1992.
    [abstract]
  3. 島岡敬一,田畑修,木村雅人,杉山進
    サーフェスマイクロマシーニング技術を用いたマイクロ圧力センサ
    IEEJ Trans. EIS, Vol.112-C, No.12, pp.736-742, 1992.
    [abstract]
  4. Akimasa Tanaka, Masayoshi Suzuki, Ryouji Asahi, Osamu Tabata, Susumu Sugiyama
    Infrared linear image sensor using a poly-Si pn junction diode array
    Infrared Physics, Vol.33, No.4, pp.229-236, 1992.
    [abstract]
  5. Osamu Tabata, Hazime Inagaki, Susumu Sugiyama, Hideo Yamada
    Characteristics of a silicon monolithic pressure-flow sensor for air mass flow rate measurements
    Heat Transfer Japanese Research, Vol.21, No.8, pp.747-761, 1992.
  6. 田畑修,村瀬英寿,阪野修,山田日出夫
    過渡的な微小圧力変化の光干渉を用いた測定
    ながれ, Vol.11, No.3, pp.191-199, 1992.
    [abstract]

1991

  1. 田畑修,稲垣大,杉山進,山田日出夫
    シリコン圧力・流量複合センサの空気流量検出特性
    IEEJ Trans. EIS, Vol.111-C, No.12, pp.637-644, 1991.
    [abstract]
1990

  1. Osamu Tabata, Susumu Sugiyama, Mitsuharu Takigawa
    Control of internal stress and young’s modulus of Si3N4 and polycrystalline silicon thin films using the ion implantation technique
    Applied Physics Letters, Vol.56, No.14, pp.1314-1316, 1990.
    [abstract]
  2. Isemi Igarashi, Tadashi Ito, Toshiyuki Taguchi, Osamu Tabata, Hazime Inagaki
    Multiple ion sensor array
    Sensors and Actuators B: Chemical, Vol.1, No.1-6, pp.8-11, 1990.
    [abstract]
  3. 田畑修,杉山進,瀧川光治,五十嵐伊勢美
    イオン注入法による圧力センサ用窒化シリコン薄膜の機械的物性制御
    IEEJ Trans. EIS, Vol.110-C, No.4, pp.228-234, 1990.
    [abstract]

1989

  1. Osamu Tabata, Ken Kawahata, Susumu Sugiyama, Isemi Igarashi
    Mechanical property measurements of thin films using load-deflection of composite rectangular membrane
    Sensors and Actuators, Vol.20, No.1-2, pp.135-141, 1989.
    [abstract]

1987

  1. Osamu Tabata, Hazime Inagaki, Isemi Igarashi
    Monolithic pressure-flow sensor
    IEEE Transactions on Electron Devices, Vol.ED-34, No.12, pp.2456-2462, 1987.
    [abstract]

1986

  1. Osamu Tabata
    Fast-response silicon flow sensor with an on-chip fluid temperature sensing element
    IEEE Transactions on Electron Devices, Vol.ED-33, No.3, pp.361-365, 1986.
    [abstract]

1981

  1. 田畑修,外山淳治,小堀博道,渡辺敏文,大野三良,太田寿城,小栗孟,内藤義英,山田和生
    電位図上での心室興奮breakthroughの認識と電極配置
    医用電子と生体工学, Vol.19, No.2, pp.100-105, 1981.
    [abstract]
  2. 田畑修,小堀博道,外山淳治,内藤義英,山田和生
    空間フィルタを用いた体表面心臓電位図からの臨床情報抽出
    医用電子と生体工学, Vol.19, No.4, pp.277-283, 1981.
    [abstract]
  3. Junji Toyama, Osamu Tabata
    Recognition of the epicardial breakthrough on body surface isopotential maps : Influence of the inter-electrode distance on the patterns reflecting the epicardial breakthrough : CLINICAL APPLICATION OF BODY SURFACE MAPPING
    Japanese Circulation Journal, Vol.45, No.10, pp.1172-1178, 1981.
    [abstract]