国際会議


Journal / Int. Conf. / Thesis

2018

    1. Yoshikazu Hirai, Yusuke Tsuji, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
      Improved Sensitivity of Ionic Liquid-Based Pressure Sensor for Body-on-a-Chip using Simulation-Based 3D Lithography
      The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, Northern Ireland, (January 21-25, 2018), pp. 511-514.
      [abstract]
    2. Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
      Zernike Generation with MEMS Deformable Mirror Actuated by Electrostatic Piston Array
      The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, Northern Ireland, (January 21-25, 2018), pp. 704-711.
      [abstract]
    3. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
      Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
      The 5th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2018), Lake Como, Italy, March 26-29, 2018, P1-15.
      [abstract]
    4. (Invited) Toshiyuki Tsuchiya
      Field Electron Emission Across Fracture Fabricated Large-Area Nanogap on MEMS
      The 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018), Singapore, Aplil 22-26, 2018.
    5. Kentaro Kawai, Takumi Hayashi, Kenta Arima, Kazuya Yamamura, Osamu Tabata
      Nanopore Fabrication and DNA sensing on Two-Dimensional Materials using Helium Ion Microscopy
      The 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018), Singapore, Aplil 22-26, 2018.
    6. Toshiyuki Tsuchiya
      Measurement of energy carrier transportation across fracture fabricated nanogap on MEMS
      Emerging Technologies 2018, Whistler, Canada, May 9-11, 2018, B1-4.
    7. Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
      Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells
      2018 IEEE International Frequency Control Symposium (IFCS 2018), Olympic Valley, CA, USA, May 22-24, 2018, ThP27.
    8. Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
      Low-Temperature Alkali Metal Production Utilizing Scalloped Silicon Grooves for Microfabricated Alkali Vapor Cells
      Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018), Hong Kong SAR, June 24-27, 2018, 94.
    9. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
      Vacuum Emission in Large-Area Nanogap Fabricated by MEMS Controlled Cleavage of Single Crystal Silicon
      The 31st International Vacuum Nanoelectronics Conference (IVNC 2018), Kyoto, Japan, July 9-13, 2018, O9-2.
    10. Yoshikazu Hirai, Yasuaki Mori, Tomoki Tabuchi, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
      Microchannel Fabrication using a Photo Patternable Adhesive Material for Recording Conformational Changes of KcsA Channel with the Diffracted X-ray Tracking Method
      The EUROSENSORS 2018, Graz, Austria, September 9-12, 2018, P45.
    11. Jiaxu Wu, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
      Fluidic-Capacitor Integrated Microfluidic Platform to Mimic Heart Beating for Generation of Functional Liver Organoids
      The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018), Kaohsiung, Taiwan, November 11-15, 2018, pp.1718-1721.
    12. Keita Hara, Tatsuya Inagaki, Naoki Yamashita, Kenta Arima, Kazuya Yamamura, Osamu Tabata, Kentaro Kawai
      Effect of Temperature Distribution in Microtube and Microfluidic Channel for DNA Origami Assembly
      The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018), Kaohsiung, Taiwan, November 11-15, 2018, pp.40-43.
    13. Mitsuhiro Horade, Osamu Tabata, Hiroaki Ito, Toshio Takayama, Dylan Tsai, Makoto Kaneko
      Development of Micromanipulator with Semiconductor Strain Gauge That Can Be Used in Solution for Characteristics Measurement
      The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018), Kaohsiung, Taiwan, November 11-15, 2018, pp.1007-1008.
    14. Shu Yunyi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
      Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
      The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan, November 13-16, 2018, 14B-3-1.
    15. Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
      Fracture Strength of a Silicon Torsional Mirror Resonator Fully Coated with Submicrometer-Thick PECVD DLC Film
      The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan, November 13-16, 2018, 15D-4-3.
    16. (Invited) Yoshikazu Hirai
      Three Dimensional UV Lithography Technologies for Microphysiological Systems
      The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan, November 13-16, 2018, accepted.
    17. Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
      Non-Contact Temperature Difference Measurement of Cleavage Plane Nanogap Electrodes with Large Surface Area
      The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA, November 25-30, 2018, TP02.07.04.
    18. Yusuke Tsuji, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
      Improvement Performance of Ionic Liquid-Based Pressure Sensor for Integration Into Body-on-a-Chip
      The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA, November 25-30, 2018, BM05.06.03.
    19. (Invited) Osamu Tabata
      MEMS & NEMS- Past, Present and Future –
      The 1st IEEE International Conference on Micro/Nano Sensors for AI, Healthcare, and Robotics, Shenzhen, China, December 6-7, 2018.
    20. (Invited) Osamu Tabata
      Micro/Nano Sensor – Present and Future –
      1st Internationale Symposium on Micro/Nano Sensors for Healthcare and Smart City, Hong Kong, December 10, 2018.
2017

  1. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Properties of Single-Crystal-Silicon Fully Coated with Submicrometer-Thick PECVD DLC
    The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), Las Vegas, NV, USA, (January 22-26, 2017), W-099, pp.732-735.
    [abstract]
  2. (Invited) Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata
    Body-on-a-Chip: an application of 3-D microstructuring techniques
    The 9th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials / The 10th International Conference on Plasma-Nano Technology & Science (ISPlasma 2017 /IC-PLANTS 2017), Nagoya, Japan, (March 2-5, 2017).
  3. (Invited) Ken-ichiro Kamei, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Heart/Cancer on a Chip: Towards Recapitulation of Side Effects
    The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA (April 9-12, 2017).
  4. Hayashi Takumi, Kentaro Kawai, Kenta Arima, Tabata Osamu, Mizuho Morita
    Nanopore Fabrication to Two Dimensional Materials on SiO2 Nanopore Membrane Using HeliumIon Microscope
    The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA (April 9-12, 2017), pp.669-670.
  5. Naoki Yamashita, Zhipeng Ma, Seongsu park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique
    The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA (April 9-12, 2017), pp.710-713.
    [abstract]
  6. Yoshikazu Hirai, Kenta Terashima, Katsuo Nakamura, Toshiyuki Tsuchiya, Osamu Tabata
    Low Temperature, Wafer-Level Process of Alkali-Metal Vapor Cells for Micro-Fabricated Atomic Clocks
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’17), Kaohsiung, Taiwan (18-22 June, 2017), pp.431-434.
    [abstract]
  7. Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
    Thermomechanical Noise of Arrayed Capacitive Accelerometers with 300-nm Gap Sensing Electrodes
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’17), Kaohsiung, Taiwan (18-22 June, 2017), pp.1002-1005.
    [abstract]
  8. Toshiyuki Tsuchiya, Koji Sugano, Hideki Takahashi, Hangyeol Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata
    Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’17), Kaohsiung, Taiwan (18-22 June, 2017), pp.1245-1248.
    [abstract]
  9. Toshiyuki Tsuchiya
    (Invited) MEMS Mirrors for automotive applications
    The 2017 International Meeting for Future of Electron Devices, Kansai (IMFEDK2017), Kyoto, Japan (29-30 June, 2017), pp. 82-83.
    [abstract]
  10. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Based Fabrication of Conformal Electrode Pairs for Thermotunneling Cooling
    The 2017 International Meeting for Future of Electron Devices, Kansai (IMFEDK2017), Kyoto, Japan (29-30 June, 2017), pp. 106-107.
    [abstract]
  11. Kenta Terashima, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Cs-Filled MEMS Cell Using Sequential Plasma Activated Bonding
    The 31st European Frequency and Time Forum and the 71st consecutive meeting of the IEEE International Frequency Control Symposium (EFTF-IFCS 2017), Besançon, France (9-13 July, 2017), pp.60-62.
    [abstract]
  12. Tatsuya Omaki, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Embedding a Flexible Parylene-Based Microelectrode Array within Body-on-a-Chip
    The 31st EUROSENSORS (EUROSENSORS 2017), Paris, France (3-6 September, 2017), Proceedings 2017, 1(4), 302.
    [abstract]
  13. Yuto Yamaki, Yuki Sato, Takayuki Yamada, Kazuhiro Izui, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata
    Deformable Mirror Design Based on Current Value Optimization and Actuator Reduction
    International Conference on Evolutionary and Deterministic Methods for Design Optimization and Control with Applications to Industrial and Societal Problems (EUROGEN 2017), Madrid, Spain (13-15 September, 2017), accepted.
  14. Toshiyuki Tsuchiya
    (Invited) Conformal nanogaps fabricated by cleavage of single-crystal silicon on MEMS
    The 43rd International Conference on Micro and Nanoengineering (MNE2017), Braga, Portugal (18-22 September, 2017)
  15. Toshiyuki Tsuchiya
    (Keynote) MEMS fabricated large-area nanogap for future energy devices
    The 3rd International Conference on Emerging Technologies: Micro to Nano (ETMN2017), Solapur, India (6-7 October, 2017)
  16. Yoshinori Takao, Kaito Nakagawa, Naoki Inoue, Kazuma Emoto, Toshiyuki Tsuchiya, Masayoshi Nagao
    Microfabrication of a Massive Emitter Array for Higher Thrust Density of Ionic Liquid Electrospray Thrusters
    The 35th International Electric Propulsion Conference (IEPC), Atlanta, GA, October 8 – 12, 2017, accepted.
  17. K. Hara, K. Arima, O. Tabata, K. Kawai
    Rapid Folding of DNA Nanostructures in Microfluidic Channel
    The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017), Savannah, GA, October 22 – 26, 2017, accepted.
  18. Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
    Bidirectional Hysteresis in Frequency Response of Arrayed Electrostatic MEMS Resonator
    The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Jeju, Korea (November 6-9, 2017), 8P-7-84.
  19. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Properties of Single Crystal Silicon Microstructure Fully-Coated by Plasma CVD Diamond-Like Carbon with Different Substrate Bias Voltages
    The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November 26–December 1, 2017), EM06.05.04.
  20. Amit Banerjee, Yasuaki Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    A MEMS Based Approach for Fabricating Conformal Nanogap Electrodes for Thermotunneling Energy Harvesting Applications
    The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November 26–December 1, 2017), ES09.03.28.
2016

  1. (invited) Toshiyuki Tsuchiya
    Mems Based Test-Stand Device for “Nano” Characterization
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B4L-A-1.
  2. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Mechanical Stability for the Connections of DNA Origami Using Anti-Parallel/Parallel Double Crossovers
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), A1L-C-5.
  3. Kentaro Kawai, Yuichi Shibuno, Takumi Hayashi, Zhipeng Ma, Naoki Yamashita, Seongsu Park, Kosuke Tanabe, Kenta Arima, Mizuho Morita, Osamu Tabata.
    Nanopore Formation in Electrolyte Solution to SiO2 Membrane Using Pulse-Voltage Injection
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), A3L-D-3.
  4. Seongsu Park, Zhipeng Ma, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai,
    Toshiyuki Tsuchiya, Osamu Tabata
    A Multibody Brownian Dynamics for Modeling Size-Separation of dsDNA Fragment and DNA Origami Tiles in Anisotropic Nanosieving Array
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B1L-D-4.
  5. Hiromasa Yagyu, Do-Nyun Kim, Osamu Tabata
    New Coarse-Grained Molecular Dynamics Model of Double Stranded DNA Chain for DNA Origami
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B3P-B-6.
    [abstract]
  6. Kanji Yasuda, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Design Optimization of Integrated Shear Strain Gauge for Single-Crystal-Silicon Parallel Tensile-Testing Device
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B3P-B-53.
  7. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Electromechanical Fabrication of Conformal Nanogap Electrodes for Thermotunnelling Cooling
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B3P-B-61.
  8. Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
    Tensile Fracture of Integrated Single-Crystal Silicon Nanowire using MEMS Electrostatic Testing Device
    The 21st European Conference on Fracture (ECF21), Catania, Italy (20-24 June, 2016), 3.1.4.
    [abstract]
  9. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °C of (110) Single Crystal Silicon Microstructures
    The 21st European Conference on Fracture (ECF21), Catania, Italy (20-24 June, 2016), 3.1.6.
    [abstract]
  10. Akiko Uno, Vijay Kumar Singh, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Fabrication of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
    The 8th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2016), Kanazawa, Japan (25-29 June, 2016), pp.113-114.
  11. Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Deformable Mirror Actuated By Electrostatic Piston Array
    The 2016 International Conference on Optical MEMS and Nanophotonics (OMN 2016), Singapore (31 July-4 August, 2016), pp.55-56.
    [abstract]
  12. Kentaro Kawai, Yuichi Shibuno, Takumi Hayashi, Zhipeng Ma, Naoki Yamashita, Seongsu Park, Kenta Arima, Mizuho Morita, Osamu Tabata
    Nanopore Formation to Thin Solid Membrane in Electrolyte Solution Using Dielectric Breakdown
    Eurosensors2016, Budapest, Hungary (4-7 Septemnber, 2016), WL.PRO-1-8629.
  13. Kio Tahara, Yoshikazu Hirai, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
    Photoresist Micro-Chamber for the Diffracted X-Ray Tracking Method Recording Single-Molecule Conformational Changes
    Eurosensors2016, Budapest, Hungary (4-7 Septemnber, 2016), WL.FLU-10-8363.
    [abstract]
  14. Kentaro Kawai, Takumi Hayashi, S. Kanetani, Yuichi Shibuno, Seongsu Park, Naoki Yamashita, Zhipeng Ma, Kenta Arima, Mizuho Morita, Osamu Tabata
    Control of Nanopore Formation to Insulation Membrane in Electrolyte Solution
    The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2016), Dublin, Ireland (9-13 October, 2016), accepted.
  15. Y. Pihosh, H. Seo, K. Mawatari, Y. Kazoe, O. Tabata, T. Tsuchiya, T. Kitamori
    High-Efficient Proton Conductor Nanochannels Array Based on a Ferroelectric Proton Trasnfer Phase Substrate Towards a μfuel Cell
    The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2016), Dublin, Ireland (9-13 October, 2016), accepted.
  16. Katsuo Nakamura, Yoshiakzu Hirai, Toshiyuki Tsuchiya, Oliver Paul, Osamu Tabata
    Simulation study of SU-8 Structures Realized by Single-Step Projection Photolithography
    IEEE Sensors 2016, Orland, FL (October 30-November 3, 2016), pp.139-141.
    [abstract]
  17. (Invited) Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Integrated Heart/Cancer on a Chip: Towards in vitro recapitulation of side effects of anti-cancer drugs
    The 10th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE NANOMED 2016), Macau SAR, China (October 30 – November 2, 2016).
  18. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Radial Mechanical Property of a Crossover Density-Varied DNA Nanotube
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 9B-2-2.
  19. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Test of a Silicon Microstructure Fully Coated with Submicrometer-Thick DLC Film Using PECVD Method
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 9D-2-4.
  20. K. Nakagawa, T. Tsuchiya, Y. Takao
    Microfabricated Emitter Arrays for an Ionic Liquid Electrospray Thruster
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 10D-4-3.
  21. Amit Banerjee, Yoshiakazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Fabricated Conformal Electrodes Attempting Thermotunnelling Refrigeration
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 11C-10-5.
  22. (Invited) Ken-ichiro Kamei Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Body on a Chip Towards Understanding of the Side Effects of Anti-Cancer Drug in Vitro
    The 29th Annual and International Meeting of Japanese Association for Animal Cell Technology (JAACT), Kobe, Japan (November 9-12, 2016).
  23. Seongsu Park, Sung Hee, Zhipeng Ma, Jongyoon Han, Toshiyuki Tsuchiya, Yoshikazu Hirai, Osamu Tabata
    On-Chip Separation of Triangular and Cylindrical DNA Origami Nanostructures Using Slanted Nanofilter Array
    2016 Annual Meeting of the AES Electrophoresis Society, San Francisco CA (November 14-16, 2016), 251s.
  24. Yu Nakano, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Design and Fabrication of Ionic Liquid-Based Pressure Sensor for Evaluation of Vascularization of Micro-Tissues
    International Symposium on Micro-Nano Science and Technology 2016 (MNST2016), Tokyo, Japan (December 16-18, 2016), SaA1-B-1.
  25. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Tensile Orientation on Slip and Fracture of (110) Silicon at High Temperature
    International Symposium on Micro-Nano Science and Technology 2016 (MNST2016), Tokyo, Japan (December 16-18, 2016), SuA1-A-2.
  26. Kanji Yasuda, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Shear Strain Gauge for Parallel Tensile-Mode Fatigue Testing Device
    International Symposium on Micro-Nano Science and Technology 2016 (MNST2016), Tokyo, Japan (December 16-18, 2016), SuA1-A-8.
2015

  1. A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata
    Size effect on brittle-ductile transition temperature of silicon by means of tensile testing
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal (18-22 Jan. 2015), pp.389-392.
    [abstract]
  2. K. Hokazono, Y. Hirai, T. Tsuchiya, O. Tabata
    ‌FET properties of single-walled carbon nanotubes individually assembled utilizing single strand DNA
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal (18-22 Jan. 2015), pp.417-420.
    [abstract]
  3. K. Sugano, D. Matsui, T. Tsuchiya, O. Tabata
    Ultrasensitive surface-enhanced raman spectroscopy using directionally arrayed gold nanoparticle dimers
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal (18-22 Jan. 2015), pp.608-611.
    [abstract]
  4. X. Ma, Y. Kato, Y. Hirai, F. Kempen, F. Keulen, T. Tsuchiya, O. Tabata
    Optimization method for 3D lithography process utilizing DMD-based maskless grayscale photolithography system
    SPIE Advanced Lithography 2015, San Jose, CA (22-26 Feb. 2015), 9426-14.
    [abstract]
  5. Z. Ma, Y.-J. Kim, S. Park, Y. Hirai, T. Tsuchiya, D.-N. Kim, O. Tabata
    Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation
    The 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015), Xi’an, China (7-11 Apr. 2015), pp.581-584.
    [abstract]
  6. K. Ban, K. Tsujimoto, Y. Hirai, A. Terao, N. Mizutani, T. Kobayashi, O. Tabata
    Alkali metal source tablet for vapor cells of atomic magnetometers
    The 2015 Joint Conference of
    The IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCF-EFTF 2015), Denver, CO (12-16 Apr. 2015), pp.174-179.
    [abstract]
  7. Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata
    Selective assembly of DNA nanostructure bridging onto a trenched silicon substrate
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15), Anchorage, AK (21-25 Jun. 2015), pp.1389-1392.
    [abstract]
  8. Y. Kato, Y. Hirai, K. Kamei, T. Tsuchiya, O. Tabata
    Microfluidic device to interconnect multiple organs via fluidic circulation: Towards Body-on-a-Chip
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15), Anchorage, AK (21-25 Jun. 2015), pp.1549-1552.
    [abstract]
  9. Y. Matsui, Y. Hirai, T. Tsuchiya, O. Tabata
    A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15), Anchorage, AK (21-25 Jun. 2015), pp.2212-2215.
    [abstract]
  10. X. Ma, Y. Kato, F. van Kempen, Y. Hirai, T. Tsuchiya, F. van Keulen, O. Tabata
    Multiple patterning with process optimization method for maskless DMD-based grayscale lithography
    The 29th EUROSENSORS (EUROSENSORS 2015), Freiburg, Germany (6-9 Sep. 2015), in Procedia Engineering, Vol.120, pp.1091-1094.
    [abstract]
  11. T. Hemmi, Y. Hirai, T. Tsuchiya, O. Tabata
    Batch Integration Process of A Free-Standing Silicon Nanowire to MEMS
    The 26th Micromechanics and Microsystems Europe workshop (MME 2015), Toledo, Spain (20-23 September, 2015), Paper No. B6, p. 29.
  12. H. Seo, Y. Pihosh, Y. Kazoe, K. Mawatari, K. Kitamura, O. Tabata, T. Tsuchiya, T. Kitamori
    Development of High-Efficient Proton Conductor Nanochannels Array Based On Ferroelectric Material
    The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2015), Gyeongju, Korea (25-29 October, 2015), pp.1124-1126.
  13. Z. Ma, N. Yamashita, S. Park, K. Kawai, Y. Hirai, T. Tsuchiya, O. Tabata
    Programmable Polymerization of DNA Origami Structures with Double Crossovers Connection
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (10-13 November, 2015), 12-P-7-77.
  14. S. Park, Z. Ma, N. Yamashita, K. Kawai, D.-N. Kim, Y. Hirai, T. Tsuchiya, O. Tabata
    A Constrained Rigid Body Brownian Dynamics Simulation for On-Chip Size-Separation of Cross-linked DNA Origami Tiles
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (10-13 November, 2015), 13P-11-118L.
  15. A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata
    Parallel Tensile-Mode Fatigue Testing of Silicon Microstructures with Integrated Piezoresistive Stain Sensors
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (10-13 November, 2015), 13P-11-124L.
2014

  1. L. Li, L. Liu, O. Tabata, W.J. Li
    Elasticity measurement of DNA origami nanotube in liquid with tapping mode AFM
    The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2014), Honolulu, HI (13-16 Apr. 2014), pp.684-687.
    [abstract]
  2. M. Gamil, K. Nakamura, A.M.R.F. El-Bab, O. Tabata, A.A. El-Moneim
    First-principles simulation on orientation dependence of piezoresistivity in graphene nanoribbon
    The 2nd International Conference on Engineering and Technology (ICET 2014), Cairo, Egypt (19-20 Apr. 2014), pp.1-6.
    [abstract]
  3. A. Uesugi, T. Yasutomi, Y. Hirai, T. Tsuchiya, O. Tabata
    Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C
    The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (29 Jun. – 2 Jul. 2014), 3-1.
  4. X. Ma, Y. Kato, Y. Hirai, F. Kempen, F. Keulen, T. Tsuchiya, O. Tabata
    An optimization approach for 3D photolithography utilizing DMD maskless exposure system
    The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (29 Jun. – 2 Jul. 2014), 6-1.
  5. T. Tsuchiya
    Towards batch assembly and integration of single-walled carbon nanotubes to micro-electromechanical devices
    2014 CMOS Emerging Technologies Research, Grenoble, France (6-8 Jul. 2014).
  6. T. Tsuchiya, V.K. Singh, Y. Hirai, O. Tabata
    Large-displacement electrostatic deformable mirror with movable bottom electrodes
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (17-21 Aug. 2014), pp.119-120.
    [abstract]
  7. Y. Kogita, Y. Hirai, O. Tabata, T. Tsuchiya
    Double-side-drive electrostatic optical chopper for time-resolved raman spectroscopy
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (17-21 Aug. 2014), pp.65-66.
    [abstract]
  8. Y. Hirai, D. Takagi, S. Anai, Y. Chihara, T. Tsuchiya, K. Fujimoto, Y. Hirao, O. Tabata
    Photoresist-based microfluidic cell sorter for photodynamic urine diagnosis EUROSENSORS 2014, Brescia, Italy (7-10 Sep. 2014), in Procedia Engineering, Vol.87, pp.62-65.
    [abstract]
  9. Y. Pihosh, N. Kabeta, K. Mawatari, Y. Kazoe, K. Kitamura, O. Tabata, T. Tsuchiya, T. Kitamori
    Development of a high efficient proton conductor media using extended-nano space under the outer electric field
    The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), San Antonio, TX (26-30 Oct. 2014), pp.1236-1239.
  10. H. Maekoba, H. Murakami, T. Tsuchiya
    Fast system-level analysis for a piezoelectric angular rate sensor
    The 4th international workshop on Piezoelectric MEMS, Kobe, Japan (28-29 Oct. 2014), O-3.
  11. A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata
    Tensile testing in vacuum with concentrated infrared light heating for single crystal silicon mechanical characterization at high temperature
    The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Fukuoka, Japan (4-7 Nov. 2014), 6C-5-1.
  12. K. Sugano, D. Matsui, T. Tsuchiya, O. Tabata
    Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers
    The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Fukuoka, Japan (4-7 Nov. 2014), 7P-11-90.
  13. H. Shimizu, M. Iwamoto, Y. Oota, Y. Hirai, O. Tabata, S. Oiki
    The diffracted X-ray tracking method for recording the single-molecule conformational changes of
    The KcsA potassium channel in a sub-millisecond time resolution
    The 45th Natl Inst Physiol Sci (NIPS) International Symposium, Okazaki, Japan (25-28 Nov. 2014), P22.
2013

  1. T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata
    DNA origami assembly on patterned silicon by AFM based lithography
    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan (20-24 Jan. 2013), pp.307-310.
    [abstract]
  2. A. Nakano, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, A. Umeda
    Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table
    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan (20-24 Jan. 2013), pp.645-648.
    [abstract]
  3. L. Li, X. Tian, Z. Dong, L. Liu, O. Tabata
    , W.J. Li Manipulation of DNA origami nanotubes in liquid using a programmable tapping mode AFM
    The 2013 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2013), Suzhou, China (7-10 Apr. 2013), pp.109-112.
    [abstract]
  4. Y. Kato, Y. Hirai, F. van Kempen, F. van Keulen, K. Sugano, T. Tsuchiya, O. Tabata
    Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography
    The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST 2013), Berlin, Germany (21-24 Apr. 2013), pp.192-193.
  5. F. Kempen, Y. Hirai, F. Keulen, O. Tabata
    Automatic process design for 3D thick-film grayscale photolithography
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’13), Barcelona, Spain (16-20 Jun. 2013), pp.1625-1628.
    [abstract]
  6. K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata
    SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’13), Barcelona, Spain (16-20 Jun. 2013), pp.1807-1810.
    [abstract]
  7. A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’13), Barcelona, Spain (16-20 Jun. 2013), pp. 1946-1949.
    [abstract]
  8. A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Fractography analysis of tensile tested (110) silicon prepared by different surface morphology and crystal orientations ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Burlingame, CA (16-18 Jul. 2013), IPACK2013-73271.
  9. M. Gamil, O. Tabata, K. Nakamura, A.M.R. Fath El-Bab, A. Abd El-Moneim
    Investigation of a new high sensitive micro-electromechanical strain gauge sensor based on graphene piezoresistivity
    The 3rd International Conference on Materials and Applications for Sensors and Transducers (IC-MAST 2013), Prague, Czech Republic (13-17 Sep. 2013).
    [abstract]
  10. M. Elwi Mitwally, T. Tsuchiya, O. Tabata, S. Sedky
    Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
    The 26th International Microprocesses and Nanotechnology Conference (MNC 2013), Sapporo, Japan (5-8 Nov. 2013), 8P-11-107.
  11. O. Tabata
    (Plenary) DNA as an Engineering Material to Bridge MEMS and Nanomedicine
    The 7th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2013), Phuket, Thailand (10-13 Nov. 2013).
  12. D. Takagi, Y. Hirai, S. Anai, Y. Chihara, K. Fujimoto, T. Tsuchiya, Y. Hirao, O. Tabata
    Microfluidic cell sorter for photodynamic urine diagnosis
    The 7th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2013), Phuket, Thailand (10-13 Nov. 2013), pp.22-26.
    [abstract]
2012

  1. T. Tsuchiya, O. Tabata, A. Umeda
    Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer
    The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France (29 Jan. – 2 Feb. 2012), pp. 420-423.
    [abstract]
  2. A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya
    Are resonators suitable for energy harvesting? -Equivalent circuit analysis of nonlinear response of MEMS resonator
    The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France (29 Jan. – 2 Feb. 2012), pp.1213-1216.
    [abstract]
  3. T. Kataoka, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.335-336.
  4. S.Z. Kiss, D.S. Hautzinger, O. Tabata, J. G. Korvink
    AuNPs conjugate DNA origami nanotubes for nanophotonic application
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.402-404.
  5. C. Huang, T. Akishiba, N. Tamura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Temperature dependency of DNA origami self-assembly rate
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.411-412.
  6. K. Kamei, Y. Hirai, Y. Makino, L. Liu, Q. Yuan, M. Yoshioka, Y. Chen, O. Tabata
    Evaluation of negative photoresists on phenotypes of human induced pluripotent stem cells (hiPSCs)
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.558-559.
  7. S. Nishino, Y. Takenaka, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Fabrication of nanogap electrodes by gold nanorod growth on substrate
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.652-653.
  8. H. Yagyu, Y. Hirai, A. Uesugi, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.999-1000.
  9. P.T. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes
    2012 MRS Spring Meeting, San Francisco, CA (9-13 Apr. 2012), B7.5.
    [abstract]
  10. T. Tanemura, S. Yamashita, H. Wado, Y. Takeuchi, T. Tsuchiya, O. Tabata
    Out-of-plane bending reliability test for intrinsic mechanical strength of polycrystalline silicon thin film using etching-damage-less membrane
    2012 MRS Spring Meeting, San Francisco, CA (9-13 Apr. 2012), B9.2.
    [abstract]
  11. K. Kamei, Y. Hirai, Y. Makino, L. Liu, Q. Yuan, Y. Chen, O. Tabata
    Phenotypic modulation of pluripotent stem cells by microfabrication materials
    The International Society for Stem Cell Research (ISSCR) 10th Annual Meeting, Yokohama, Japan (13-16 Jun. 2012), T-2262.
  12. O. Tabata
    (Keynote) DNA as an engineering material
    The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China (8-11 Jul. 2012).
  13. T. Tsuchiya
    (Invited) Material and Device Reliability in Si MEMS Sensors
    The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China (8-11 Jul. 2012).
  14. D. Matsui, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Investigation of nonlinear decrease of autofluorescence in negative thick-film resist
    The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China (8-11 Jul. 2012), ac12000168.
  15. F. van Kempen, Y. Hirai, F. van Keulen, O. Tabata
    Optimization techniques for gray-scale photolithography
    The 9th ASMO UK / ISSMO conference on Engineering Design Optimization Product and Process Improvement, Cork, Ireland (5-6 Jul. 2012).
  16. H. Yagyu, Y. Hirai, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation
    The 26th International conference EUROSENSORS (EUROSENSORS XXVI), Krakow, Poland (9-12 Sep. 2012), in Procedia Engineering, Vol.47, pp.402-405.
    [abstract]
    kurenai
  17. F. van Kempen, Y. Hirai, F. van Keulen, O. Tabata
    Automated optimization of gray-scale masks for 3D micro-structuring
    The 6th European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2012), Vienna, Austria (10-14 Sep. 2012).
  18. Y. Hirai
    (Invited) Material characterizations of negative photoresist for bio-MEMS applications
    The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012), Honolulu, HI (16-19 Oct. 2012), pp.19.
  19. K. Kamei, Y. Hirai, Y. Makino, M. Yoshioka, L. Liu, M. Nakajima, Q. Yuan, Y. Chen, O. Tabata
    Phenotypic modulation of pluripotent stem cells (PSCs) induced by microfabrication materials
    The 16th International Conference on. Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2012), Okinawa, Japan (28 Oct. – 1 Nov. 2012), pp.1063-1065.
  20. M. Gamil, K. Nakamura, A.M.R.F. El-Bab, O. Tabata, M. Serry, A.A. El-Moneim
    Evaluation of strain gauge factors of graphene ribbon models based on first-principles electronic-state calculations
    The 1st International Conference on Innovative Engineering Systems (ICIES 2012), Alexandria, Egypt (7-9 Dec. 2012), pp.52-57.
    [abstract]
2011

  1. T. Ikehara, T. Tsuchiya
    Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens
    International Symposium on Plasticity and Its Current Applications, Puerto Vallarta, Mexico (3-8 Jan. 2011).
  2. K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico (23-27 Jan. 2011), pp.368-371.
    [abstract]
  3. S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, K. Takashima Cross comparison of fatigue lifetime testing on silicon thin film specimens
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico (23-27 Jan. 2011), pp.404-407
    [abstract]
  4. A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya
    Local stress analysis of single crystalline silicon resonator using micro raman spectroscopy
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico (23-27 Jan. 2011), pp.449-452.
    [abstract]
  5. M. Sato, I. Kanno, H. Kotera, O. Tabata
    Piezoelectric MEMS deformable mirrors with high-density actuator array
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico (23-27 Jan. 2011), pp.1265-1268.
    [abstract]
  6. K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata
    High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.75-78.
    [abstract]
  7. Y. Hirai, Y. Nakai, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Epoxy-based permeable membrane fabrication for 3D microfluidic device
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.188-191.
    [abstract]
  8. M. Li, L. Liu, N. Xi, Y. Wang, Z. Dong, G. Li, O. Tabata, X. Xiao, and W. Zhang
    Imaging and measuring
    The protein distribution of lymphoma cells using atomic force microscopy
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.192-195.
    [abstract]
  9. C. Huang, T. Saeki, M. Endo, H. Sugiyama, C.-H. Weng, G.-B. Lee, K. Sugano, T. Tsuchiya, O. Tabata
    Configurable assembly of DNA origami on MEMS by microfluidic Device
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.203-206.
    [abstract]
  10. H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.1288-1292.
    [abstract]
  11. T.P. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.1297-1300.
    [abstract]
  12. K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata
    High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.1773-1776.
    [abstract]
  13. T.P. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Analysis of acceleration sensitivity in MEMS tuning fork gyroscope
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.2006-2009.
    [abstract]
  14. K. Sugano, R. Hiraoka, T. Tsuchiya, O. Tabata, M. Klaumunzer, M. Voigt, W. Peukert
    Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.2570-2573.
    [abstract]
  15. Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata
    Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.2706-2709.
    [abstract]
  16. Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata
    Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane
    The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2011), Hsinchu, Taiwan (12-18 Jun. 2011), pp.62-63.
  17. K. Sugano, A. Nakata, H. Yoshimune, T. Tsuchiya, O. Tabata
    High-speed pulsed mixing with high-frequency switching of pumping from three micropumps ASME-JSME-KSME Joint Fluids Engineering Conference 2011 (AJK2011-FED), Hamamatsu, Japan (24-29 Jul. 2011).
  18. T.P. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope EUROSENSORS XXV, Athens, Greece (4-7 Sep. 2011), in Procedia Engineering, Vol.25, pp.51-54.
    [abstract]
  19. Y. Hirai, K. Kamei, Y. Makino, L. Liu, Q. Yuan, Y. Chen, O. Tabata
    mESC and hiPSC proliferation on negative photoresists for microfluidics EUROSENSORS XXV, Athens, Greece (4-7 Sep. 2011), in Procedia Engineering, Vol.25, pp.1233-1236.
    [abstract]
  20. T. Tsuchiya, H. Tokusaki, Y. Hirai, K. Sugano, O. Tabata
    Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
    The 19th IFIP/IEEE International Conference on Very Large Scale Integration, Hong Kong (3-5 Oct. 2011), pp.208-213.
    [abstract]
  21. M.H. Kwan, S. Song, X. Lu, L. Lu, Y.K. Teh, Y.F. Teh, W.C. Chong, Y. Gao, W. Hau, F. Xeng, M. Wong, C. Huang, A. Taniyama, Y. Makino, S. Nishino, T. Tsuchiya, O. Tabata
    Designs for improving the performance of an electro-thermal in-plane actuator
    The 19th IFIP/IEEE International Conference on Very Large Scale Integration, Hong Kong, (3-5 Oct. 2011), pp.220-225.
    [abstract]
  22. H. Yagyu, Y. Hirai, A. Uesugi, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application
    2011 MRS Fall Meeting, Boston MA, (28 Nov. – 2 Dec. 2011), MRS Proceedings 2012 1415 : mrsf11-1415-tt05-14 (6 pages).
    [abstract]
2010

  1. G. Lopez, T. Tanemura, R. Sato, T. Saeki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda
    DNA-Grafted-Polymer Mediated Self-Assembly of Micro Components
    The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2010), Xiamen, China (20-23 Jan. 2010), pp.248-252.
    [abstract]
  2. R. Sato, T. Tanemura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    DNA mediated self-assembly of micro-scale components and sites
    The 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices (FNANO 2010), Snowbird, UT (27-30 Apr. 2010), pp.11-12.
  3. M. Sato, I. Kanno, H. Kotera
    Development of piezoelectric MEMS deformable mirror
    The 20th ASME Annual Conference on Information Storage & Processing Systems 2010, Santa Clara CA (14-15 Jun. 2010).
  4. T. Wakita, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, T. Ikehara
    Crystal anisotropy on strength of single crystal silicon measured by tensile testing
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (6-9 Jul. 2010), pp.44.
  5. H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (6-9 Jul. 2010), pp.160.
  6. K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Sacrificial microchannel sealing by glass-Frit reflow for micromachined alkali gas-filled cell
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (6-9 Jul. 2010), pp.211.
  7. Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata
    Embedded double-layered microchannel fabrication for microfluidic devices using developer permeability of negative thick-film resists
    The 24th International conference EUROSENSORS (EUROSENSORS XXIV), Linz, Austria (5-8 Sep. 2010), in Procedia Engineering, Vol.5, pp.854-857.
    [abstract]
  8. A.M.R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M.E.H. Eltaib, M.M. Sallam
    New compensation technique for
    The soft tissue stiffness measurements using two sensor probes configuration
    The 24th International conference EUROSENSORS (EUROSENSORS XXIV), Linz, Austria (5-8 Sep. 2010), in Procedia Engineering, Vol.5, pp.1304-1307.
    [abstract]
2009

  1. T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda
    Sequential and selective self-assembly of micro components by DNA grafted polymer
    The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Solent, Italy(25-29 Jan. 2009), pp.184-187.
    [abstract]
  2. K. Sugano, T. Ozaki, R. Hiraoka, T. Tsuchiya, O. Tabata
    Fabrication of large-scale nanoparticle array using combination of self-assmbly and 2-step transfer International Conference on Electronics Packaging 2009 (ICEP 2009), Kyoto, Japan (14-16 Apr. 2009).
  3. R. Sato, T. Tabemura, G. Lopez, M. Serry, K. Sugano, T. Tsuchiya, O. Tabata
    Modeling of self-face-alignment process using contact potential difference International Conference on Electronics Packaging 2009 (ICEP 2009), Kyoto, Japan (14-16 Apr. 2009).
  4. F. van Keulen, Y. Hirai, O. Tabata
    Automated optimization of light dose distribution for moving-mask lithography
    Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE 2009), Delft, The Netherlands (26-29 Apr. 2009), pp.1-9.
    [abstract]
  5. Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist
    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denver, CO (21-25 Jun. 2009), pp.1616-1619.
    [abstract]
  6. Y. Nishimori, N. Fujiwara, H. Ooiso, T. Tsuchiya, G. Hachiguchi 3DOF equivalent circuit model of a comb-drive actuator
    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denver, CO (21-25 Jun. 2009), pp.1758-1761.
    [abstract]
  7. Y. Ura, K. Sugano, T. Tsuchiya, O. Tabata
    Tensile Testing of Fullerene Nano Wire using Electrostatic MEMS Device
    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denver, CO (21-25 Jun. 2009), pp.2062-2065.
    [abstract]
  8. Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    3-dimensional thick-resist microstructuring adopting wavelength dependency of photoresist property
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (25-28 Jun. 2009), pp.27-28.
  9. Y. Hirai, H. Yoshimune, K. Tsujimoto, K. Sugano, T. Tsuchiya, O. Tabata
    Microchannel embedded in glass-frit layer bonding for gas-filled sealed cavity
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (25-28 Jun. 2009), pp.153-154.
  10. P. Meyer, S. Hafizovic, Y. Hirai, J.G. Korvink
    Simulation tool for deep X-ray lithography: an overview
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (25-28 Jun. 2009), pp.175-176.
  11. A.M.R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M.E.H. Eltaib, M.M. Sallam
    Micro machined tactile sensor for soft tissue compliance detection
    The 23rd Conference EUROSENSORS 2009, Lausanne, Switzerland (6-9 Sep. 2009), in Procedia Engineering, Vol.1, pp.84-87.
    [abstract]
  12. M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Capacitive micromachined ultrasonic transducers with novel membrane design
    The 23rd Conference EUROSENSORS 2009, Lausanne, Switzerland (6-9 Sep. 2009), in Procedia Engineering, Vol.1, pp.389-392.
    [abstract]
  13. T. Tsuchiya
    (invited) Technologies, applications, and reliabilities of microelectromechanical systems (MEMS)
    The 9th SEGJ International Conference, Sapporo, Japan (12-14 Oct. 2009), pp.22.
  14. O. Tabata
    (Keynote) Fabrication platform for configurable nanosystem
    The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan, Taiwan (18-21 Oct. 2009), pp.12.
  15. Y. Hirai
    (Invited) Single-exposure and single-development process of single-layer negative photoresist for low-cost microfluidic system fabrication
    The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan, Taiwan (18-21 Oct. 2009), pp.16.
2008

  1. O. Tabata
    (invited) Micro/Nano assembly as a key technology for NEMS
    The 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2008), Hainan, China (7-10 Jan. 2008).
  2. T. Ikehara T. Tsuchiya
    Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.435-438.
    [abstract]
  3. T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano O. Tabata
    Fabrication of free-standing fullerene nanowire using direct electronbeam writing and sacrificial dry etching
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.689-692.
    [abstract]
  4. Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata
    Manipulation system for nano/micro components integration via transpotation and self-assembly
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.836-839.
    [abstract]
  5. T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata
    Gold nanoparticle patterning by self-assembly and tranfer for LSPR based sensing
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.1048-1051.
    [abstract]
  6. T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata
    DNA mediated sequential self-assembly of nano/micro components
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.1052-1055.
    [abstract]
  7. T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata
    Contact potential differnce for seqential assembly and face alignment of sub-millimater components
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.1056-1059
    [abstract]
  8. T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata, K.F. Bohringer
    Contact potential difference for face alignment of submillimeter components with chemical reaction kinetics
    The 5th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures & Devices (FNANO 2008), Snowbird, UT (22-25 Apr. 2008).
  9. O. Tabata
    (invited) Micro/Nano assembly as a key to realize NEMS
    The 5th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures & Devices (FNANO 2008), Snowbird, UT (22-25 Apr. 2008).
  10. O. Tabata
    (invited) Particle assembly as a key approach to realize NEMS
    The 17th APHS Seminar,Kyoto, Japan (April 12, 2008).
  11. Y. Uchida, K. Sugano, T. Tsutiya, O. Tabata
    Mixing speed-controlled gold nanoparticle synthesis using pulsed mixing microfluidic system with valveless micropumps
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), Tainan, Taiwan (23-26 Jun. 2008), 2C1-2.
  12. Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya and O. Tabata
    Modeling of positive-tone type thick-photoresist dissolution and squential development profile simulation
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), Tainan, Taiwan (23-26 Jun. 2008), 3E1-3
  13. H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata
    Y-axis vibrating SOI gyroscope using vertical comb electrodes
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), Tainan, Taiwan (23-26 Jun. 2008), 1B2-6
  14. S. Taue, S. Ichihara, Y. Sugihara, K. Ishikawa, H. Sugioka, N. Mizutani, S. Liu, Y. Hirai, O. Tabata, T. Kobayashi
    Measurement of biomagnetic fields in small animals by use of an optical pumping atomic magnetometer
    The 16th International Conference on Biomagnetism (BIOMAG 2008), Sapporo, Japan (25-29 Aug. 2008).
  15. O. Tabata
    (invited) MEMS/MS and assembly as key components and technology for advanced system
    The First Japan-Egypt International Symposium on Science and Technology 2008 (EJICST 2008), Tokyo, Japan (8-10 Jun. 2008), pp.21-22.
  16. A.M.R. Fath El Bab, T. Tamura, K. Sugano, T. Tsuchiya, O. Tabata, M.E.H. Eltaib Mohamed M. Sallam
    Design and simulation of a tactile sensor for soft-tissue compliance detection
    The First Japan-Egypt International Symposium on Science and Technology 2008 (EJICST 2008), Tokyo, Japan (8-10 Jun. 2008), pp.144.
  17. F. van Keulen, Y. Hirai, O. Tabata
    Objective function and adjoint sensitivities for moving-mask lithography
    The 12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, Victoria, Canada (10-12 Sep. 2008), AIAA-2008-5934
  18. Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    3-dimensional positive thick-resist microstructuring adopting wavelength dependency of photoresist property
    The 22nd international conference EUROSENSORS (EUROSENSORS XXII), Dresden, Germany (7-10 Sep. 2008), pp.1559-1602.
  19. O. Tabata
    (Invited) Micro/Nano assembly as a key to SENS (Synthetic Engineering for Nano Systems)
    Pacific Rim Meeting on Electrochemical and Solid-state Science (PRiME 2008), Honolulu, HI (13-17 Oct. 2008).
  20. A. Nakata, S. Tanaka, K. Sugano, T. Tsuchiya, O. Tabata
    Electrical equivalent circuit model of microfluidic system containing piezoelectric valveless micropump and viscoelastic PDMS microchannel
    The 12th International Conference on Miniturized System for Chemistry and Life Sciences (MicroTAS 2008), San Diego, CA (12-16 Oct. 2008), pp.730-732.
  21. O. Tabata
    (Invited) DNA as an intelligent adhesive for self assembly of Micro/Nano components
    The 2nd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NEMS 2008), Suzhou, China (6-9 Nov. 2008).
  22. O. Tabata
    (Invited) Project based education on MEMS/Microsystem with international collaboration
    The 1st Symposium on E-JUST, Curricula Development, Research and Innovation Directions, Alexandria, Egypt (25-27 Nov. 2008).
2007

  1. K. Sugano, W. Sun, T. Tsuchiya, O. Tabata
    Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron
    The 2nd International Symposium on Portable Synchrotron Light Sources and Advanced Applications, Kusatsu, Japan (15 Jan. 2007).
  2. Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata
    Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives
    The 6th International IEEE Conference on Polymer and Adhesives in Microelectronics and Photonics (IEEE Polytronic 2007), Tokyo, Japan (15-18 Jan. 2007), pp.128-132.
    [abstract]
  3. O. Tabata
    (invited) Role of university research for open innovations in MNT
    The 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2007), Bangkok, Thailand (16-19 Jan. 2007).
  4. T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata
    Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer
    The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan (21-25 Jan. 2007), pp.353-356.
    [abstract]
  5. H. Yagyu, O. Tabata
    Micro-powder blasting simulation with mask erosion using cellular automaton
    The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan (21-25 Jan. 2007), pp.215-218.
    [abstract]
  6. K. Miyamoto, T. Jomori, K. Sugano, O. Tabata, T. Tsuchiya
    Mechanical calibration of MEMS spring with 0.1-μn force resolution
    The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan (21-25 Jan. 2007), pp.227-230.
    [abstract]
  7. Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya
    Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments
    The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan (21-25 Jan. 2007), pp.267-270.
    [abstract]
  8. T. Tsuchiya
    (Tutorial) MEMS reliability
    The 20th International Conference on Microelectronic Test Structures, Tokyo, Japan (19-22 Mar. 2007).
  9. Y. Inamoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Moving-mask UV lithography and embedded microchannels
    The 7th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST 2007), Besancon, France (7-9 Jun. 2007), pp. 31-32
  10. Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata
    Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.545-568.
    [abstract]
  11. T. Ikeda, K. Sugano, T. Tsuchiya and O. Tabata
    Tensile testing of single crystal silicon thin films at 800oC using IR heating
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.571-573.
    [abstract]
  12. S. Tanaka, O. Ichihashi, K. Sugano, T. Tsuchiya, O. Tabata
    Analysis of valveless piezoelectric micropump using electrical equivalent circuit model
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.2183-2186.
    [abstract]
  13. H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata
    A differential capacitive three-axis SOI accelerometer using vertical comb electrodes
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.1483-1486.
    [abstract]
  14. T. Ikehara, T. Tsuchiya
    Parallel fatigue test of micromachined single crystal silicon using lateral resonating device
    MicroNanoReliability 2007 Conference, Berlin, Germany (2-5 Sep. 2007), pp.107
  15. T. Tsuchiya
    (invited) Mechanical reliability of micro/nano-structures in MEMS devices
    20th International Microprocesses and Nanotechnology Conference (MNC 2007), Kyoto, Japan (5-8 Nov. 2007).
  16. T. Tsuchiya, T. Jomori, K. Sugano, O. Tabata
    Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching
    2007 MRS Fall Meeting, Boston, MA (25-30 Nov. 2007), II5.47
  17. K. Miyamoto, K. Sugano, T. Tsuchiya, O. Tabata
    Effect of surface oxide layer on mechanical properties of single crystalline silicon
    2007 MRS Fall Meeting, Boston, MA (25-30 Nov. 2007), DD2.3
    [abstract]
2006

  1. N. Matsuzuka, Y. Hirai, O. Tabata
    Prediction method of 3-D shape fabricated by double exposure technique in deep X-ray lithography (D2XRL)
    The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey (22-26 Jan. 2006), pp.186-189.
    [abstract]
  2. K. Sugano, H. Yamada, O. Ichihashi, T. Tsuchiya, O. Tabata
    Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps
    The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey (22-26 Jan. 2006), pp.546-549.
    [abstract]
  3. W. Yoshikawa, A. Sasabe, S. Koji, T. Tsuchiya, O. Tabata, A. Ishida
    Vertical Drive Micro Actuator Using SMA Thin Film for a Smart Button
    The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey (22-26 Jan. 2006), pp.734-737.
    [abstract]
  4. Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya
    Tensile and tensile-mode fatigue test of single crystal silicon in various environment
    The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006), Singapore (25-28 Jun. 2006).
  5. K. Sugano, W. Sun, T. Tsuchiya, O. Tabata
    Design and analysis of soft X-ray source using resonance transition radiation for tabletop synchrotron
    The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006), Singapore (25-28 Jun. 2006).
2005

  1. M. Sugimoto, K. Minai, Y. Fujii, M. Uemura, S. Nishio, O. Tabata
    A novel micro counter-stream-mode oscillating-flow (COSMOS) heat-pipe
    The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005), Miami, FL (30 Jan. – 3 Feb. 2005), pp.681-684.
    [abstract]
  2. S. Wakida, H. Ishii, N. Naruishi, T. Miyado, M. Kurokawa, S. Shimotsuma, T. Demura, O. Tabata
    Multichannel microfluidic chip based on capillary electrophoresis using industrial LIGA plastic replica process Biosensors & Biomaterials Workshop 2005 (Biosensors 2005), Tsukuba, Japan (7-9 Mar. 2005), O-19.
  3. T. Kakinaga, A. Hatai, O. Tabata, Y. Isono
    Silicon anisotropic wet etching simulation using molecular dynamics
    The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’05), Seoul, Korea (5-9 Jun 2005), pp.816-819.
    [abstract]
  4. T. Tsuchiya
    (Invited) Tensile testing of MEMS materials
    The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’05), Seoul, Korea (5-9 Jun 2005), pp.1953-1956.
    [abstract]
  5. Y. Hirai, N. Matsuzuka, O. Tabata
    Analytical method for process parameters determination on double exposure deep X-ray lithography
    The 6th High Aspect Ratio Micro Structure Technology (HARMST 2005), Gyeongju, Korea (10-13 Jun. 2005), pp.144-145.
  6. N. Matsuzuka, Y. Hirai, O. Tabata
    A new experimental technique for process parameters determination on X-ray lithography
    The 6th High Aspect Ratio Micro Structure Technology (HARMST 2005), Gyeongju, Korea (10-13 Jun. 2005), pp.146-147.
  7. T. Tsuchiya
    Mechanical testing of integrated microsystems
    FIS conference on future integrate systems, Cambridge, UK (8-11 Aug. 2005), pp.57-58.
  8. O. Tabata
    (Invited) Computational MEMS process design and development
    2005 International Conference on Solid State Devices and Materials (SSDM 2005), Kobe, Japan (12-15 Sep. 2005), pp.70-71.
  9. O. Tabata
    (Invited) Computational 3-D microfabrication for MEMS and MEMS research activities at micro-nano system Lab.
    International Nano and MEMS Workshop, pp.1-8, 2005.
  10. O. Tabata
    (Invited) Computational three-dimensional process design for MEMS
    International Conference on MEMS and Semiconductor Nanotechnology, Kharagpur, India (20-22 Dec. 2005).
2004

  1. N. Matsuzuka, Y. Hirai, O. Tabata
    A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithography
    The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), Maastricht,
    The Netherlands (25-29 Jan. 2004), pp.681-684.
    [abstract]
  2. H. Yagyu, S. Hayashi, O. Tabata
    Rapid prototyping of glass chip with micro-powder blasting using nano-particles dispersed polymer mask
    The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), Maastricht,
    The Netherlands (25-29 Jan. 2004), pp.697-700.
    [abstract]
  3. S. Wakida, N. Naruishi, T. Demura, M. Kurokawa, F. Tsujikawa, O. Tabata
    High density multichannel plastic chip for genetic analysis using industrial LIGA plastic replica process
    The 1st International Symposium on Micro & Nano Technology (ISMNT-1), Honolulu, HI (14-17 Mar. 2004), p.38.
  4. O. Tabata
    (Invited) Moving mask deep X-ray lithography for three dimensional microfabrication
    The 5th Asian Synchrotron Radiation Forum, Saga Japan (16-17 Mar. 2004), pp.29-32.
  5. T. Kakinaga, A. Hatai, Y. Isono, O. Tabata
    Improved potential function for molecular dynamics simulation of Si wet etching
    The 4th Workshop on Physical Chemistry of Wet Etching of Silicon (PCWES 2004), Montreal, Canada (26-28 May 2004).
  6. K. Sugano, O. Tabata
    Simulation of surface roughness in Si etching with XeF2
    Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004), Sapporo, Japan (4-8 Jul. 2004), pp.547-552.
  7. A. Ishida, M. Sato, O. Tabata, W. Yoshikawa
    Shape memory thin films formed with carrousel type magnetron sputtering apparatus
    The 3rd International Workshop on Smart Sensors in Livestock Monitoring, Leuven, Belgium (10-11 Sep. 2004).
  8. W. Yoshikawa, A. Sasabe, O. Tabata, A. Ishida
    Vertical direction drive micro actuator using shape memory alloy thin film with flexible joints
    2004 International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2004), Nagoya, Japan (31 Oct. – 3 Nov. 2004), pp.547-552.
    [abstract]
  9. T. Tsuchiya
    Mechanical reliability evaluation and its standardization of thin films used in MEMS
    CANEUS 2004 Conference on Micro-Nano-Technologies, Monterey, CA (1-5 Nov. 2004).
    [abstract]
  10. S. Wakida, N. Naruishi, T. Miyado, H. Ishii, M. Kurokawa, S. Shimotsuma, T. Demura, O. Tabata
    Multichannel microchip capillary electrophoresis using industrial LIGA replication process
    The 5th Asia-Pacific International Symposium on Micro Scale Separations and Analysis (APCE 2004), Seoul, Korea (5-8 Dec. 2004), p.110.
  11. O. Tabata
    (Invited) Computational MEMS process design and development
    The 15th International Sensors Conference (ISC’04), pp.23-30, 2004.
2003

  1. O. Tabata, H. Kojima, T. Kasatani, Y. Isono, R. Yoshida
    Chemo-mechanical actuator using self-oscillating gel for artificial cilia
    The 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto, Japan (19-23 Jan. 2003), pp.12-15.
    [abstract]
  2. K. Sugano, O. Tabata
    Reduction in surface roughness and aperture size effect for XeF2 etching of Si Micromachining and Microfabrication Process Technology Vlll (SPIE 4979), San Jose, CA (25 Jan. 2003), pp.62-69.
    [abstract]
  3. S. Wakida, N. Naruishi, X. Wu, T. Demura, S. Shimotsuma, S. Shinohara, H. Shiraishi, O. Tabata
    Multichannel array chip based on plastic injection molding using the LIGA process
    The 1st International Congress on Bio-Nanointerface (ICBN 2003), Tokyo, Japan (19-24 May 2003).
  4. H. Yagyu, S. Hayashi, O. Tabata
    Laser microfabrication using nano-particles dispersed polymer resist
    The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’03), Boston, MA (8-12 Jun. 2003), pp.762-765.
    [abstract]
  5. S. Hafizovic, Y. Hirai, O. Tabata, J.G. Korvink
    X3D: 3D X-ray lithography and development simulation for MEMS
    The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’03), Boston, MA (8-12 Jun. 2003), pp.1570-1573.
    [abstract]
  6. Y. Nakamura, S. Uemura, K. Okajima, O. Tabata
    Moving mask direct photo-etching (M2DPE) for 3-D micromachining of polytetrafluoroethylene
    The 5th High Aspect Micro Structure Technology (HARMST 2003), Monterey, CA (15-17 Jun. 2003), pp.19-20.
  7. Y. Hirai, O. Tabata, S. Hafizovic, J.G. Korvink
    Measurement of PMMA dissolution rate and system calibration for predictive 3-D simulation of moving mask deep X-ray lithography
    The 5th High Aspect Micro Structure Technology (HARMST 2003), Monterey, CA (15-17 Jun. 2003), pp.37-38.
  8. N. Matsuzuka, Y. Hirai, O. Tabata, S. Hafizovic, J.G. Korvink
    Effect of development process in moving mask deep X-ray lithography for 3D microfabrication
    The 5th High Aspect Micro Structure Technology (HARMST 2003), Monterey, CA (15-17 Jun. 2003), pp.59-60.
  9. H. Yagyu, S. Hayashi, O. Tabata
    Micro-powder blasting using nano-particles dispersed polymer mask 2003 International Symposium on Micromechatronics and Human Science (MHS 2003), Nagoya, Japan (19-22 Oct. 2003), pp.95-100.
    [abstract]
  10. Y. Hirai, N. Matsuzuka, S. Hafizovic, J.G. Korvink, O. Tabata
    3D simulation system for moving mask deep X-ray lithography
    2003 International Symposium on Micromechatronics and Human Science (MHS 2003), Nagoya, Japan (19-22 Oct. 2003), pp.271-276.
    [abstract]
  11. N. Baba, K. Makino, T. Kakinaga, O. Tabata, Y. Isono, J.G. Korvink
    Verification of etching rule in CAES
    2003 International Symposium on Micromechatronics and Human Science (MHS 2003), Nagoya, Japan (19-22 Oct. 2003), pp.277-280.
    [abstract]
  12. O. Tabata, N. Tanaka, H. Shiraishi, T. Demura, M. Kurokawa, F. Tsujikawa, N. Naruishi, S. Wakida
    Replicate process for high density multichannel plastic chip for genetic analysis
    The 8th International Symposium on Microchemistry and Microsystem (ISMM 2003), Tokyo, Japan (18-19 Nov. 2003), pp.51-52.

2002

  1. O. Tabata, N. Matsuzuka, T. Yamaji, S. Uemura, K. Yamamoto
    3D fabrication by moving mask deep X-ray lithography (M2DXL) with multiple stages
    The 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV (20-24 Jan. 2002), pp.180-183.
    [abstract]
  2. M. Sugimoto, H. Saika, S. Shibata, S. Shinohara, O. Tabata
    A noble bonding technique for micro polymer chip using sacrificial channel and adhesive printing
    The 6th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2002), Nara, Japan (3-7 Nov. 2002), pp.398-400.
  3. T. Kakinaga, N. Baba, O. Tabata, Y. Isono, K. Ehrmann, J.G. Korvink
    Simulation for observing the Si anisotropic process in atomic scale
    2002 International Symposium on Micromechatronics and Human Science (MHS 2002), Nagoya, Japan (20-23 Oct. 2002), pp.35-40.
    [abstract]
  4. K. Sugano, O. Tabata
    Techniques for reduction in surface roughness and aperture size effect for XeF2 etching of Si 2002 International Symposium on Micromechatronics and Human Science (MHS 2002), Nagoya, Japan (20-23 Oct. 2002), pp.47-52.
    [abstract]
  5. N. Matsuzuka, O. Tabata
    Algorithm for analyzing optimal mask movement pattern in moving mask deep X-ray lithography 2002 International Symposium on Micromechatronics and Human Science (MHS 2002), Nagoya, Japan (20-23 Oct. 2002), pp.159-164.
    [abstract]
  6. T. Kakinaga, N. Baba, O. Tabata, Y. Isono, K. Ehrmann. J.G. Korvink
    Simulation of anisotropic chemical etching of single crystalline silicon using a cellular-automata
    The 3rd Workshop on Physical Chemistry of Wet Etching of Silicon (PCWES 2002), Nara, Japan (4-6 Jun. 2002), pp.31-36.
  7. A. Ishida, M. Sato, W. Yoshikawa, O. Tabata
    Bimorph-type microactuator using Ti-Ni shape memory thin film Materials Science Forum, pp.487-490, 2002.
    [abstract]
  8. O. Tabata, H. Shiraishi
    Micro/Nano chip technology using deep X-ray lithography and it’s application CREST International Workshop on Micro- and Nanotechnology for Genomic/Proteomic Analysis, Awaji, Japan (8-9 Nov. 2002).
  9. S. Shinohara, T. Akaboshi, H. Shiraishi, O. Tabata
    Separation of fluorescein derivatives on micro polymer chip fabricated by X-ray lithography CREST International Workshop on Micro- and Nanotechnology for Genomic/Proteomic Analysis, Awaji, Japan (8-9 Nov. 2002).
  10. O. Tabata
    MEMS research and education at ritsumeikan university and 3-D micro fabrication technology using deep X-ray lithography
    The 4th Korea Micro Electro Mechanical Systems Workshop, Gyeongju, Korea (12-13 Apr. 2002), pp.297-302.

2001

  1. O. Tabata, N. Matsuzuka, T. Yamaji, H. You, J. Minakuchi, K. Yamamoto
    Fabrication of 3-dimensional microstructures using moving mask deep X-ray lithography (M2DXL)
    The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland (21-25 Jan. 2001), pp.94-97.
    [abstract]
  2. O. Tabata, H. Hirasawa, S. Aoki, R. Yoshida, E. Kokufuta
    Ciliary motion actuator using self-oscillating gel
    The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland (21-25 Jan. 2001), pp.405-408.
    [abstract]
  3. H. You,N. Matsuzuka,T. Yamaji, O. Tabata
    Moving mask deep X-ray lithography system with multi stage for 3-D microfabrication
    The 4th High Aspect Ratio Micro Structures (HARMST 2001), Baden-Baden, Germany (17-19 Jun. 2001), pp.13-14.
  4. S. Shinohara, H. Saika, K. Enami, S. Shibata, T. Akaboshi, M. Itou, O. Tabata, H. Shiraishi, T. Nishimoto
    Performance of μ-CE polymer chip fabricated by X-ray lithography International Symposium on Microchemistry and Microsystems (ISMM 2001), Kawasaki, Japan (16-18 Sep. 2001), pp.100-101.
  5. K. Sugano, O. Tabata
    Etching rate control of mask material for XeF2 etching using UV exposure Micromachining and Microfabrication Process Technology VII (SPIE 4557), San Francisco, CA (22 Oct. 2001), pp.18-23.
2000

  1. O. Tabata,S. Konishi,P. Cusin,Y. Ito,F. Kawai,S. Hirai, S. Kawamura
    Microfabricated tunable bending stiffness device
    The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Japan (23-27 Jan. 2000), pp.23-27.
    [abstract]
  2. S. Kawanaka,H. Shiraishi,T. Matsuda,O. Tabata
    , S. Ikeda Microchannel electrophoresis chip for DNA analysis International Symposium on Prospects of Bioelectrochemistry in
    The 21st Century, Kyoto, Japan (18-20 Mar. 2000), p.38.
  3. O. Tabata, H. You, H. Shiraishi, H. Nakanishi, T. Nishimoto, K. Yamamoto, Y. Baba
    μ-CE Chip Fabricated by Moving Mask Deep X-ray Lithography Technology
    The 4th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2000), Enschede,
    The Netherlands (14-18 May 2000), pp.143-146.
  4. O. Tabata
    Anisotropic etching of Si in TMAH solutions
    The 2nd Workshop on Physical Chemistry of Wet Etching of Silicon (PCWES 2000), Toulouse, France (15-16 May 2000).
  5. H. You, N. Matsuzuka, T. Yamaji, O. Tabata
    Deep X-ray exposure system with multistage for 3-D microfabrication 2000 International Symposium on Micromechatronics and Human Science (MHS 2000), Nagoya Japan (22-25 Oct. 2000), pp.53-58.
    [abstract]
  6. K. Sugano, O. Tabata
    Effects of etching pressure and aperture width on Si etching with XeF2 2000 International Symposium on Micromechatronics and Human Science (MHS 2000), Nagoya Japan (22-25 Oct. 2000), pp.89-94.
    [abstract]
  7. H. Shiraishi, S. Yamada, T. Matsuda, K. Takagi, O. Tabata
    Electrophoresis micro channel chip fabricated by using synchrotron radiation 2000 International Chemical Congress of Pacific Basin Societies (Pacifichem 2000), Honolulu, HI (14-19 Dec. 2000), p.495.

1999

  1. O. Tabata, K. Terasoma, N. Agawa, K. Yamamoto
    Moving mask LIGA (M2LIGA) process for control of side wall inclination
    The 12th Micro Electro Mechanical Systems Workshop (MEMS 1999), Orlando, FL (17-21 Jan. 1999), pp.252-256.
    [abstract]
  2. O. Tabata, H. Hirasawa
    New sensing principle based on the order formation in a nonlinear oscillator group
    The 10th International Conference on Solid-State Sensors and Actuators (Tansducers’99), Sendai, Japan (7-10 Jun. 1999), pp.454-457.
  3. O. Tabata, M. Yashima, T. Yoshioka, K. Sato
    Effect of Potassium Ion on Anisotropy of TMAH
    The 10th International Conference on Solid-State Sensors and Actuators (Tansducers’99), Sendai, Japan (7-10 Jun. 1999), pp.542-545.
  4. O. Tabata, T. Yamamoto, A.A. Seshia, R.T. Howe
    Integrated resonant accelerometer based on rigidity change
    The 10th International Conference on Solid-State Sensors and Actuators (Tansducers’99), Sendai, Japan (7-10 Jun. 1999), pp.1538-1541.
  5. K. Sugano, O. Tabata
    Study of XeF2 pulse etching using wagon wheel pattern 1999 International Symposium on Micromechatronics and Human Science (MHS 1999), Nagoya, Japan (23-26 Nov. 1999), pp.163-167.
    [abstract]
  6. K. Terasoma, O. Tabata
    Multiple moving mask LIGA (M3LIGA) technology
    The 3rd High Aspect Ratio Micro Structures (HARMST 1999), Kisarazu, Japan (13-15 Jun. 1999), pp.66-67.

1998

  1. O. Tabata
    Anisotropy and selectivity control of TMAH
    The 11th Micro Electro Mechanical Systems Workshop (MEMS 1998), Heidelberg, Germany (25-29 Jan. 1998), pp.229-2338.
    [abstract]
  2. Y. Baba, O. Tabata
    Novel microfabricated capillary array electrophoresis chip fabricated by synchrotron radiation and direct observation of dynamics of DNA molecules in microchannels
    The 3rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 1998), Banff, Canada (13-16 Oct. 1998), pp.331-334.
  3. O. Tabata, T. Yamamoto
    2-Axis detection resonant accelerometer based on rigidity change Micromachined Devices and Components IV (SPIE 3514), Santa Clara, CA (20 Sep. 1998), pp.210-216.
    [abstract]

1997

  1. T. Tsuchiya, O. Tabata, J. Sakata, Y. Taga
    Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
    The 10th Micro Electro Mechanical Systems Workshop (MEMS 1997), Nagoya, Japan (26-30 Jan. 1997), pp.529-534.
    [abstract]
  2. Y. Omura, Y. Nonomura, O. Tabata
    New resonant accelerometer based on rigidity change
    The 9th International Conference on Solid-State Sensors and Actuators (Transducers’97), Chicago, IL (16-19 Jun. 1997), pp.855-858.
    [abstract]
  3. N. Fujitsuka, J. Sakata, Y. Miyachi, K. Mizuno, K. Otsuka, Y. Taga, O. Tabata
    Monolithic pyroelectric infrared image sensor using PVDF thin film
    The 9th International Conference on Solid-State Sensors and Actuators (Transducers’97), Chicago, IL (16-19 Jun. 1997), pp.1237-1240.
    [abstract]
  4. H. Ueno, M. Hosaka, Y. Zhang, O. Tabata, S. Konishi, S. Sugiyama
    Study on fabrication of high aspect ratio microparts using the LIGA process 1997 International Symposium on Micromechatronics and Human Science (MHS 1997), Nagoya, Japan (5-8 Oct. 1997), pp.49-54.
    [abstract]
  5. O. Tabata
    Silicon Anisotropic Etching -Effect of Etching Products and Diffusion- CAD for MEMS Workshop, p.21, 1997.

1996

  1. S. Kawahito, A. Yamasawa, S. Koga, Y. Tadokoro, K. Mizuno, O. Tabata
    Digital interface circuits using sigma-delta modulation for integrated micro-fluxgate magnetic sensors 1996 IEEE International Symposium on Circuits and Systems (ISCAS’96), Atlanta, GA (15 May 1996), pp.340-343.
    [abstract]
  2. O. Tabata
    Silicon micromachining technology and its application to microsensors
    The 5th International Aerospace Symposium’96, Nagoya, Japan (3-4 Dec. 1996).
1995

  1. O. Tabata
    pH-Controlled TMAH etchants for silicon micromachining
    The 8th International Conference on Solid-State Sensors and Actuators (Transducers’95), Stockholm, Sweden (25-29 Jun. 1995), pp.83-86.
    [abstract]
  2. O. Tabata
    MEMS activities in toyota and japan SENSOR EXPO 95, Boston MA (15-16 May 1995).

1994

  1. O. Tabata, H. Murase, O. Banno, H. Yamada
    Measurement of transient low pressure on a flat plate caused by an impinging vortex ring
    The 2nd International Conference on Fluid Dynamic Measurement and Its Applications, Beijing, China (1994) pp.518-521.
  2. H. Yamada, N. Hayashi, O. Tabata, H. Hiramatsu, T. Naitoh
    Flow past a rectangular cylinder with a rectangular cavity
    The 3rd Asia Symposium on Visualization, Chiba, Japan (May 1994), pp.92-95.
  3. S. Sugiyama, O. Tabata, K. Shimaoka, R. Asahi
    Micromachined Sensors Realized with IC Process Technology
    IEEE International Electron Devices Meeting (IEDM’94), San Francisco, CA (11-14 Dec. 1994), pp.127-130.
    [abstract]

1993

  1. R. Asahi, J. Sakata, O. Tabata, M. Mochizuki, S. Sugiyama, Y. Taga
    Integrated pyroelectric infrared sensor using PVDF thin film deposited by electro-spray method
    1993 MRS Spring Meeting, San Francisco CA (12-16 Apr. 1993), pp.79-84.
    [abstract]
  2. O. Tabata, R. Asahi, N. Fujitsuka, M. Kimura, S. Sugiyama
    Electrostatic driven optical chopper using SOI wafer
    The 7th International Conference on Solid-State Sensors and Actuators (Transducers’93), Yokohama, Japan (7-10 Jun. 1993), pp.124-127.
  3. K. Shimaoka, O. Tabata, M. Kimura, S. Sugiyama
    Micro-diaphragm pressure sensor using polysilicon sacrificial layer etch-stop technique
    The 7th International Conference on Solid-State Sensors and Actuators (Transducers’93), Yokohama, Japan (7-10 Jun. 1993), pp.632-635.
  4. R. Asahi, J. Sakata, O. Tabata, M. Mochizuki, S. Sugiyama, Y. Taga
    Integrated pyroelectric infrared sensor using PVDF thin film deposited by electro-spray method
    The 7th International Conference on Solid-State Sensors and Actuators (Transducers’93), Yokohama, Japan (7-10 Jun. 1993), pp.656-659.

1992

  1. K.J. Gabriel, O. Tabata, K. Shimaoka, S. Sugiyama, H. Fujita
    Surface-normal electrostatic/pneumatic actuator
    IEEE Micro Electro Mechanical Systems Workshop (MEMS 1992), Travemunde, Germany (4-7 Feb. 1992), pp.128-132.
    [abstract]

1991

  1. O. Tabata, K. Shimaoka, S. Sugiyama
    In situ observation and analysis of wet etching process for micro electro mechanical systems
    IEEE Micro Electro Mechanical Workshop (MEMS 1991), Nara, Japan (30 Jan. – 2 Feb. 1991), pp.99-102.
    [abstract]
  2. S. Sugiyama, K. Shimaoka, O. Tabata
    Surface micromachined micro-diaphragm pressure sensors
    The 6th International Conference on Solid-State Sensors and Actuators (Transducers’91), San Francisco, CA (24-27 Jun. 1991), pp.188-191.
    [abstract]
  3. T. Nagata, H. Terabe, S. Kuwahara, S. Sakurai, O. Tabata, S. Sugiyama, M. Esashi
    Digital compensated capacitive pressure sensor using CMOS technology for low pressure measurements
    The 6th International Conference on Solid-State Sensors and Actuators (Transducers’91), San Francisco, CA (24-27 Jun. 1991), pp.308-311.
    [abstract]
  4. O. Tabata, R. Asahi, H. Funabashi, S. Sugiyama
    Anisotropic etching of silicon in (CH3)4NOH solutions
    The 6th International Conference on Solid-State Sensors and Actuators (Transducers’91), San Francisco, CA (24-27 Jun. 1991), pp.811-814.
    [abstract]
  5. O. Tabata, H. Funabashi, K. Shimaoka, R. Asahi, S. Sugiyama
    Surface micromachining using polysilicon sacrificial layer
    The 2nd International Symposium on Micro Machine and Human Science, (1991), pp.163-172.
1989

  1. O. Tabata, K. Kawahata, S. Sugiyama, I. Igarashi
    Mechanical property measurements of thin films using load-deflection of composite rectangular membrane IEEE Micro Electro Mechanical Workshop (MEMS 1989), Salt Lake City, UT (20-22 Feb. 1989) pp.152-156.
    [abstract]
  2. I. Igarashi, T. Ito, T. Taguchi, O. Tabata, H. Inagaki
    Multiple ion sensor array
    The 5th International Conference on Solid-State Sensors and Actuators (Transducers’89), Montreux, Switzerland (25-30 Jun. 1989), pp.3-4.

1987

  1. O. Tabata, H. Inagaki, I. Igarashi
    Monolithic pressure-flow sensor with a Thermal isolation structure
    The 4th International Conference on Solid-State Sensors and Actuators (Transducers’87), Tokyo Japan (2-5 Jun. 1987). pp.340-343.

1980

  1. J. Toyama, O. Tabata, M. Okajima, K. Yamada
    Microcomputer processing system for body surface isopotential map and epicardial isochron-map
    The 3rd World Congress on Medical and Health Informatics (MEDINFO’80), Tokyo Japan (29 Sep. – 4 Oct. 1980), pp.259-263.