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Nano/Micro System Laboratory

Department of Micro Engineering, Kyoto University

京都大学大学院工学研究科マイクロエンジニアリング専攻

ナノシステム創成工学講座 ナノ・マイクロシステム工学分野

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Research Topics

Thermodynamics and mechanical properties characterization of DNA origami structures based ...

DNA origami is inc […]


Tensile testing of silicon covered with DLC film

DLC (Diamond Like […]


Immobilization of DNA origami onto silicon substrate

MEMS device needs […]


Electromagnetic-driven deformable mirror device

Adaptive optics is […]



MEMS Deformable Mirror Actuated By Electrostatic Piston Array

Inspection light o […]


parallel tensile testing of silicon with integrated strain gauge

In order to shorte […]


High-temperature mechanical property of single crystal silicon microstructures

Understanding of h […]


Tensile strength of single crystal silicon microstructures

Silicon is a stand […]



2D array formation of DNA origami

DNA origami that i […]


On-chip size-separtion of DNA nanostructures

The aim of this re […]


3D lithography simulator for thick negative photoresist

Lithography has be […]


Low-noise microchamber for diffracted X-ray tracking method

The diffracted X-r […]



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Nano/Micro System Engineering Laboratory
Department of Micro Engineering, Kyoto University
Kyoto Daigaku-Katsura C3, Nishikyo-ku, Kyoto 615-8540, JAPAN
TEL:075-383-3693 / FAX:075-383-3738 / E-mail

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