MEMS2011 (The 24th IEEE International Conference on Micro Electro Mechanical Systems: http://www.ieee-mems2011.org) was held in Cancun, Mexico on January 23 – 27, 2011 at the Hilton Cancun Golf and Spa Resort. This international conference is one of the premier annual events reporting research results on every aspect of Microsystems technology. 3 abstracts from Tabata lab. and 1 abstract collaborated with Prof. Tsuchiya were accepted by the technical program committee for poster presentation. Authors and titles of the papers are:
【PACKAGING TECHNOLOGIES】
K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, and O. Tabata SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER
【MATERIALS AND DEVICE CHARACTERIZATION】
A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, and T. Tsuchiya LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY
S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, K. Takashima CROSS COMPARISON OF FATIGUE LIFETIME TESTING ON SILICON THIN FILM SPECIMENS
【MICRO-ACTUATORS】
M. Sato, I. Kanno, H. Kotera, and O. Tabata PIEZOELECTRIC MEMS DEFORMABLE MIRRORS WITH HIGH-DENSITY ACTUATOR ARRAY
