The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017) will be in Kaohsiung, Taiwan, from June 18-22, 2017. From Tabata Lab., three abstracts have been accepted.
W1C.004
Y. Hirai, K. Terashima, K. Nakamura, T. Tsuchiya, and O. Tabata
LOW TEMPERATURE, WAFER-LEVEL PROCESS OF ALKALI-METAL VAPOR CELLS FOR MICRO-FABRICATED ATOMIC CLOCKS
M3P.020
T. Tsuchiya, Y. Matsui, Y. Hirai, and O. Tabata
THERMOMECHANICAL NOISE OF ARRAYED CAPACITIVE ACCELEROMETERS WITH 300-NM GAP SENSING ELECTRODES
T3P.026
T. Tsuchiya, K. Sugano, H. Takahashi, H. Seo, Y. Pihosh, Y. Kazoe, K. Mawatari, T. Kitamori, and O. Tabata
DRY ETCHING AND LOW-TEMPERATURE DIRECT BONDING PROCESS OF LITHIUM NIOBATE WAFER FOR FABRICATING MICRO/NANO CHANNEL DEVICE