６月２１日〜２５日まで米国・アンカレッジで開催されたTransducers 2015に土屋，平井，松井，森の４名が参加し，下記の３件の発表を行いました．
The 18th International Conference on Solid-State Sensors, Actuators and Microsystems “Transducers 2015” (http://www.transducers2015.org/) will be held in Anchorage, Alaska, June 21-25, 2015. From Tabata Lab., 3 abstract were accepted by the technical program committee as Poster presentation. The authors and title are;
M3P.032
Authors: Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, and O. Tabata
Title: SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE
Abstract
We demonstrated for the first time the versatility of the previously proposed concept of DNA nanostructure integration on MEMS by selectively assembling DNA nanostructures to form a bridge over a trenched silicon. A DNA origami (30 × 150 nm) was fixed to bridge the trench (100 nm width) using the hybridization between ssDNA on the DNA origami and immobilized ssDNA-pattern at the edges of trench. An ODS-SAM was utilized as a masking layer for a SPL with better process stability than a TMS-SAM.
M3P.049
Authors: Y. Kato, Y. Hirai, K. Kamei, T. Tsuchiya, and O. Tabata
Title: MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP
Abstract
We developed a simplified microfluidic device (1) assembling multiple organs within a device and (2) integrating a closed-loop medium circulation system to investigate the effects of drug candidates and their metabolites on two organs, namely body-on-a-chip. For its fabrication, simple and reliable 3D lithography was applied to improve the PDMS molding. The fabricated PDMS microfluidic device was successfully applied to evaluate the effects of an anti-cancer drug (Doxorubicin) on cell survival.
M3P.098
Authors: Y. Matsui, Y. Hirai, T. Tsuchiya, and O. Tabata
Title: A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT
Abstract
We have developed a 10×10 single-axis accelerometer array, whose dimensions are 1/10 of typical accelerometers. Here, the size effect of the capacitive sensitivity is investigated. To solve the pull-in problem, which is more apparent on miniaturizing, nonlinear programming to optimize dimensions is used. The accelerometer is fabricated using electron beam lithography. The fabricated accelerometer was successfully operated without pull-in, which showed our design method was useful to avoid it.