We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by using in-plane and out-of-plane coupled resonators for designing robust TFGs. Our research results on in-plane and out-of-plane results showed that sensing anti-phase mode is excited against external acceleration which will result as acceleration output. To suppress the acceleration output, we proposed a method named as freqeuncy decoupling method “sensing in-phase mode should be separated as far as possible from sensing anti-phase mode (decoupling ratio, DR)” which was verified and from the reults we obtained design guidelines for designing anti-shock TFGs.
[Applications]
- Yaw or Roll-sensing in harsh environments (Ex. Automotives)
[Publications]
- T P Singh et. al, Microsystem Technologies vol.18 (6) (2012), 797-803
- P S Thakur et. al, Microsystem Technologies vol.20 (3) (2014), 403-411
- P S Thakur et. al, IEEJ Transactions on Sensors and Micromachines, Vol. 134-E, No. 12, (2014) pp. 392-399.