MNC 2013 (26th International Microprocesses and Nanotechnology Conference) will be held in Sapporo, Hokkaido on November 5-8, 2013. This conference covers not only lithography applications to micro-and nano-structure fabrication and related physics and devices, but also their fusion applications with other fields like bio, medical information, and communication technology.
From Tabata Lab., one abstract was accepted by the technical program committee for the presentation.
- M. Elwi Mitwally, T. Tsuchiya, O. Tabata, S. Sedky
Improvement of Tensile Strength of Freestanding Single Crystal Silicon Microstructures using Localized Harsh Laser Treatment
[Conference HP]
- NMC 2013: http://imnc.jp/