10月3日~5日に香港で開催されるIEEE VLSI-SOC2011国際会議において下記の発表を行います。
Session 7. MEMS and new devices
7.1 Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
7.3 Designs for Improving the Performance of an Electro-Thermal In-Plane Actuator
Man Ho Kwan1, Sichao Song1, Xing Lu1, Lei Lu1, Ying Khai Teh1, Ying Fei Teh1, Wing Cheung Chong1, Yan Gao1, William Hau1, Fan Xeng1, Man Wong1, Chunmei Huang2, Akira Taniyama2, Yoshihide Makino2, So Nishino2, Toshiyuki Tsuchiya2, Osamu Tabata2
1Hong-Kong University of Science and Technology, Hong Kong SAR, China
2Kyoto University, Japan