(5/12)論文掲載 Ikehara, Tsuyoshi, & Tsuchiya, Toshiyuki. (2009). Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films. J. Appl. Phys., 105(9), 093524-10.
(5/12)論文掲載 Ikehara, Tsuyoshi, & Tsuchiya, Toshiyuki. (2009). Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films. J. Appl. Phys., 105(9), 093524-10.