Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formation, measurement of gap distance and curr ...
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliabi ...
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property ...
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mecha ...
