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To improve the performance of MEMS vibration gyros, it is necessary to make the stiffness of the res ...

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A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...

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単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した.

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We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by ...