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Silicon micromachining and assembly technology Emitter array for ionic liquid electrospray thrusterN ...

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Development of MEMS teststand device for instrumentation in nanoscale. Based on MEMS sensor technolo ...

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Design, fabrication, measurement and analysis of various sensors (accelerometer and vibrating gyrosc ...

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Mechanical Reliability Evaluation in Microsystem and MEMS MEMS is being used in potable and mobile d ...

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