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Silicon micromachining and assembly technology

Emitter array for ionic liquid electrospray thruster
Nanogap fab ...

Development of MEMS teststand device for instrumentation in nanoscale.

Based on MEMS sensor technology, in whic ...

Design, fabrication, measurement and analysis of various sensors (accelerometer and vibrating gyroscope) and actuator ...

Mechanical Reliability Evaluation in Microsystem and MEMS

MEMS is being used in potable and mobile devices. The ...

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We would like to update timely to report our activity. Your support is highly app ...