Microfabrication Technology
Silicon micromachining and assembly technology Emitter array for ionic liquid electrospray thrusterN ...
Nanoscale instrumentation using MEMS
Development of MEMS teststand device for instrumentation in nanoscale. Based on MEMS sensor technolo ...
Sensor and actuator
Design, fabrication, measurement and analysis of various sensors (accelerometer and vibrating gyrosc ...
Reliability of Micro/Nano Machine
Mechanical Reliability Evaluation in Microsystem and MEMS MEMS is being used in potable and mobile d ...
Site Renewal
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