Microfabrication Technology

Silicon micromachining and assembly technology Emitter array for ionic liquid electrospray thrusterN ...
Nanoscale instrumentation using MEMS

Development of MEMS teststand device for instrumentation in nanoscale. Based on MEMS sensor technolo ...
Sensor and actuator

Design, fabrication, measurement and analysis of various sensors (accelerometer and vibrating gyrosc ...
Reliability of Micro/Nano Machine

Mechanical Reliability Evaluation in Microsystem and MEMS MEMS is being used in potable and mobile d ...
Site Renewal

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