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Silicon micromachining and assembly technology

Emitter array for ionic liquid electrospray thruster
Nanogap fab ...

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Development of MEMS teststand device for instrumentation in nanoscale.

Based on MEMS sensor technology, in whic ...

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Design, fabrication, measurement and analysis of various sensors (accelerometer and vibrating gyroscope) and actuator ...

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Mechanical Reliability Evaluation in Microsystem and MEMS

MEMS is being used in potable and mobile devices. The ...

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We have renewed our web site!

We would like to update timely to report our activity. Your support is highly app ...