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Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mir ...

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DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its ...

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In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...

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 Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is us ...

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DLC (Diamond Like Carbon) film is one of the promising  coating material in MEMS industry deal ...

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In order to shorten a testing time for evaluation of tensile-mode fatigue properties of single cryst ...

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Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in ha ...

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Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their op ...