Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mir ...
Tensile behaviors of micron-scaled silicon coated with sub-micro meter thick PECVD DLC film
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is us ...
Tensile testing of silicon covered with DLC film
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal ...
Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile-mode fatigue properties of single cryst ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in ha ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their op ...