Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the promising coating material in MEMS indu ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsional mirror device. One is the process us ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...