Parallel tensile testing device with integrated shear strain gauge for single crystal silicon

In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have developed parallel tensile testing device with integrated strain gauge. This research proposes the parallel tensile fatigue test device integrating shear strain gauge as a load sensor and we aim to realize tensile fatigue test at high load frequency. The high stiffness helps decreasing actuator amplitude and increasing drive frequency, so fatigue testing time will shorten. Recently, We improved the stiffness of testing system and device design, and we confirmed that it was possible to conduct 〖10〗^7 or more cycles of parallel tensile fatigue test at 150 Hz by using new device.

[Applications]

・Database of fracture strength of single crystal silicon

・Design guideline of MEMS devices with a higher reliability

[Publications]

• A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata, The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), 13P-11-124L.
• Y. Yamazaki, Y. Hirai, T. Tsuchiya, O. Tabata, Parallel tensile-mode testing of single crystal silicon be specimen integrating shear strain gauge, International Conference on Micro & Nano Engineering 2019 (MNE 2019), Rodos, Greece (23 – 26 Sep. 2019).