Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD

DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its many desirable mechanical and functional properties. In this research, the tensile testing was carried on micro-scaled Si thin film full coated by PECVD DLC film with different deposition bias by PECVD method. An increasing in tensile properties was observed.


  • To improve the reliability of  MEMS device