The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018) (Conference HP) will be held in Belfast, Northern Ireland, UK, from 21 – 25 January 2018. From Tabata Lab., two abstracts have been accepted as poster presentation.
T-116
A. Uno, Y. Hirai, O. Tabata, and T. Tsuchiya
ZERNIKE GENERATION WITH MEMS DEFORMABLE MIRROR ACTUATED BY ELECTROSTATIC PISTON ARRAY
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Y. Hirai, Y. Tsuji, K. Kamei, T. Tsuchiya, and O. Tabata
IMPROVED SENSITIVITY OF IONIC LIQUID-BASED PRESSURE SENSOR FOR BODY-ON-A-CHIP USING SIMULATION-BASED 3D LITHOGRAPHY