The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018) (Conference HP) will be held in Belfast, Northern Ireland, UK, from 21 – 25 January 2018. From Tabata Lab., two abstracts have been accepted as poster presentation.
A. Uno, Y. Hirai, O. Tabata, and T. Tsuchiya
ZERNIKE GENERATION WITH MEMS DEFORMABLE MIRROR ACTUATED BY ELECTROSTATIC PISTON ARRAY
Y. Hirai, Y. Tsuji, K. Kamei, T. Tsuchiya, and O. Tabata
IMPROVED SENSITIVITY OF IONIC LIQUID-BASED PRESSURE SENSOR FOR BODY-ON-A-CHIP USING SIMULATION-BASED 3D LITHOGRAPHY