The 2012 MRS Spring Meeting (www.mrs.org/spring2012/) will be held in San Francisco, CA USA on April 9 – 13, 2012 at the Moscone West Convention Center and Marriott Marquis.
2 abstracts from Tabata lab. was accepted by the technical program committee for the presentation. The authors and titles are;
【Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI】
● Praveen Thakur Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Vibration Analysis of Coupled Vertical Resonators for Acceleration Sensitivity Reduction of out-of-plane Vibratory Gyroscopes
● Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
Out-of-plane Bending Reliability Test for Intrinsic Mechanical Strength of Polycrystalline Silicon Thin Film Using Etching-damage-less Membrane