Special Issue to Celebrate JMM’s 30th Anniversary

Prof. Tsuchiya contributes to the special issue in Journal of Micromechanics and Microengineering. The topical review describes the fracture and fatigue properties of silicon for MEMS. Enjoy!

Mechanical reliability of silicon microstructures
Toshiyuki Tsuchiya 2022 J. Micromech. Microeng. 32 013003