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MEMS Tensile testing of Integrated Si Nanowire

2014年10月1日2023年4月17日Micromaterial,ResearchSilicon

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Nano/Micro System Engineering Laboratory
Department of Micro Engineering, Kyoto University
Kyoto Daigaku-Katsura C3, Nishikyo-ku, Kyoto 615-8540, JAPAN
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