ThermalDeposition

ThermalDeposition

mechCRwiki

抵抗加熱真空蒸着装置†

ULVAC,VPC-260FI

Specification 仕様†

Procedure 利用方法†

Operation Training†

1. Contact Prof. Yokokawa (ryuji@me.kyoto-u.ac.jp) to get a permission of usage.
2. Get operation training.
3. After operation training,e-mail to Prof. Yokokawa and Ms. K. Kawano.

Reservation†

1. Book the machine through Website.
2. Use the machine.

Super Users†

See SuperUsers Page!

Approved Users†

★Yokokawa lab. 横川研
Ryuji Yokowa, 横川 隆司（教員）
Kazuya fujimoto,藤本 和也（教員）

★Nakabe lab. 中部研
Kazuya Tatsumi, 巽　和也（教員）

Machine Administrator†

Ryuji Yokokawa, 横川 隆司

Photo†