IRInspector

IRInspector

赤外透過顕微鏡

SCHOTT MORITEX IR-MEMS Inspector

Main Application

Quality inspection, detection and evaluation:

• Wafer bonding void
• Chipping and after dicing
• MEMS device
• Nondestructive side etching measurement for SiO2 sacrificial layer etching

Specification 仕様

See the following URL: IR-MEMS Inspector

Procedure 利用方法

Operation Training

1. Contact Prof. Hirai (hirai@me.kyoto-u.ac.jp) to get a permission of usage.
2. Get operation training.
3. After operation training, e-mail to Prof. Hirai and Ms. K. Kawano.

On Use

Approved Users

Machine Administrator

★土屋研究室
平井 義和

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