Paper published – Journal of Microelectromechanical Systems

Masaki Shimofuri, Amit Banerjee, Jun Hirotani, Yoshikazu Hirai, Toshiyuki Tsuchiya
Nanometer order separation control of large working area nanogap created by cleavage of single-crystal silicon along {111} planes using a MEMS device
Journal of Microelectromechanical Systems, Vol. 32, Issue 1 (2023), pp. 67-73.
DOI: 10.1109/JMEMS.2022.3213999

This research is supported by JSPS KAKENHI JP21H01261.