Toshiyuki TSUCHIYA

■Contact Address

Department of Micro Engineering Graduate School of Engineering, Kyoto University
Kyoto daigaku-Katsura C3, Nishikyo-ku, Kyoto 615-8540, JAPAN
TEL: +81-75-383-3690 / FAX: +81-75-383-3738

■Short Biography

Toshiyuki Tsuchiya received the M.S. degree from the University of Tokyo, Japan, and the Ph.D. degree from Nagoya University, Japan, in 1993 and 2004, respectively. He worked with Toyota Central Research and Development Laboratories from 1993 to 2004. In 2004, he joined Kyoto University as an associate professor and now he belongs to the Department of Micro Engineering, Kyoto University, Japan .He is currently engaged in the research of silicon surface micromachining, its application in MEMS, the mechanical property evaluation of micro materials, and the reliability of MEMS devices.


  • 1998 R&D100 Award by R&D Magazine “Thin Film Tensile Tester"
  • 2012 IEC 1906 Award


■Contributions in Academic Society and Conferences

  • Journal of Micromechanics and Microengineering
    • Editorial Board Member (2011-)
  • Micro & Nano Letters
    • Editorial Board Member (2013-)
  • IEEE International Conference on Microelectromechanical Systems (MEMS)
    • General Co-chair in 2013
    • International Steering Committee Member (2011-16)
    • Technical Program Committee Member (2004, 2010-14)
  • IEEE International Reliability Physics Symposium (IRPS)
    • Technical Program Committee Member (2010)
  • International Microprocesses and Nanotechnology Conference (MNC)
    • Technical Program Committee Vice Chair (2015, 2017)
    • Technical Program Committee Chair (2016)

■Selected Publications

Full publication list

  • Micro-/Nano-Materials Characterization
    • T. Tsuchiya, O. Tabata, J. Sakata, and Y. Taga, “Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films,"Journal of Microelectromechanical Systems Vol. 7, No. 1, 106-113 (1998). Abstract
    • T. Tsuchiya, A. Inoue, and J. Sakata, “Tensile testing of insulating thin films; Humidity effect on tensile strength of SiO2 films,"Sensors and Actuators A; Physical Vol. A82, No.1-3, 286-290 (2000) Abstract
    • T. Tsuchiya, M. Hirata, N. Chiba, R. Udo, Y. Yoshitomi, T. Ando, K. Sato, K. Takashima, Y. Higo, Y. Saotome, H. Ogawa, and K. Ozaki, “Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films," Journal of Microelectromechanical Systems, Vol. 14. No. 5, pp. 1178-1186 (2005). Abstract
  • MEMS
    • T. Tsuchiya,Y. Kageyama, H. Funabashi, and J. Sakata, “Polysilicon Vibrating Gyroscope Vacuum-Encapsulated in an On-Chip Micro Chamber," Sensors and Actuators A: Physical Vol. A90, No. 1-2, 49-55 (2001). Abstract
    • T. Tsuchiya and H. Funabashi, “A z-axis differential capacitive SOI accelerometer with vertical comb electrodes," Sensors and Actuators A: Physical, Vol. 116, No. 3, 378-383 (2004). Abstract