Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs

For small-size, low-cost and high-performance gyroscopes, wine-glass mode vibratory gyroscopes using the microelectromechanical system (MEMS) technology are attracting attentions. The gyro consists of a resonator that vibrates at a constant velocity amplitude and can measure angle and/or angular rate by detecting the rotation of vibration direction caused by the Coriolis effect. In the previous study, we used (100) single-crystal silicon as a resonator, which allows a low fabrication cost and we proposed a ring resonator with a chamfered rectangle supporting spring structure that compensates the anisotropy of the elastic modulus of (100) silicon. Its dimensions were optimized by numerical analysis using the finite element method and angular rate detection was demonstrated with fabricated devices. However, the computational cost is high, and it is difficult to optimize the dimensions of various parts with high accuracy and in a short time. This study proposes a theoretical analysis model for the structural design and dimension optimization of a ring resonator made of an anisotropic material.

Conference

• Ayumu Takahashi, Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya, Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs, The 11th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2024), Hiroshima, JAPAN, March 25-28, 2024, pp.1-4, DOI: 10.1109/INERTIAL60399.2024.10502107
• Ayumu Takahashi, Amit BanerJee, Jun Hirotani and Toshiyuki Tsuchiya, Kyoto Univ., Japan, (100) silicon ring gyroscope with rectangle springs aiming at frequency and thermoelastic Qfactor matching, 37th International Microprocesses and Nanotechnology Conference (MNC 2024), Kyoto, Japan, Nov. 12-15, 2024, 15P-1-48
• 高橋歩夢*，霜降真希，Amit Banerjee，廣谷潤，土屋智由，（100）単結晶シリコンリング型振動ジャイロにおける矩形支持ばねを用いた共振周波数とQ値の同時マッチング，第15回「マイクロ・ナノ工学シンポジウム」，仙台，2024年11月25‐28日，26A3-PN-24