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DLC (Diamond Like Carbon) film is one of the promising  coating material in MEMS industry deal ...

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Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to co ...

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In order to shorten a testing time for evaluation of tensile-mode fatigue properties of single cryst ...

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Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in ha ...

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Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their op ...

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  Silicon nanowire has excellent mechanical and electrical properties and is expected to be app ...

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A microelectromechanical system (MEMS) is being developed for controlled fracture of a silicon micro ...

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Capacitive accelerometers have been widely used for consumer and automobile applications. Our purpos ...