Yearly Archives: 2018

Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams

This entry was posted in Actuators Nanomaterials Research on 2018年6月6日

MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The device is used for variou […]

Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope

This entry was posted in Research Sensors on 2018年6月6日

MEMS gyroscopes for measuring rate or angle of rotation can be used to provide heading information for inertial navigati […]

Resonant fatigue testing of single-crystal silicon torsional micromirror

This entry was posted in Actuators Micromaterial Research on 2018年6月6日

Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mirror devices can scan […]

Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy

This entry was posted in Nanogap Research on 2018年6月6日

Vacuum nanogap electrodes are attracting attention because they can dramatically improve the thermal power generation ef […]

Control of Gold Nano Dimer Structure with DNA Origami Molds

This entry was posted in DNANanotech Research on 2018年6月6日

DNA origami is a method to create nanostructures by DNA. We use DNA origami structures as molds in order to produce gold […]

Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array

This entry was posted in Actuators Research on 2018年6月6日

Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is necessary to control […]

MEMS fabricated conformal electrodes for thermotunneling applications

This entry was posted in Nanogap Research on 2018年6月6日

We developed a microelectromechanical system (MEMS) to fabricate nanogap electrodes of uniform gap-size (~ 100 nm) acros […]

第35回「センサ・マイクロマシンと応用システム」シンポジウム

This entry was posted in Activity Information News on 2018年5月16日

10月30日（火）～11月1日（木）に札幌で開催される，第35回「センサ・マイクロマシンと応用システム」シンポジウムの発表申込を開始しました（締切：5月28日（月）正午）．皆様からの積極的な投稿とご参加をお待ちしております．合わせて技術展示 […]

iCAN’18国内予選で第1位

This entry was posted in Activity Information News on 2018年5月2日

4月22日（日）宮城県仙台市、スリーエム仙台市科学館にてiCAN’18国内予選が開催され，team TBT2（帯谷・霜降）が第1位を獲得しました．合わせて，6月23日から香港で開催される国際大会への出場を決めました． ●国内予選 […]

IFCS 2018

This entry was posted in News Presentation on 2018年4月28日

The 2018 IEEE International Frequency Control Symposium (IFCS 2018) (Conference HP) will be held in Olympic Valley, CA, […]

Emerging Technologies 2018