Electrostatic MEMS for tensile-testing of nanomaterials

56 In this research, we focus on tensile testing of these materials. The goal of this study is to conduct tensile testing of these materials with high resolutions which has not been realized yet with enough repeatability. We developed an electrostatic MEMS tensile testing device and confirmed that our device can test nano materials with nano order resolutions in both tensile force and elongation. We designed fabrication process of free-standing fullerene nano wire and integrated it on the device. As a result, we successfully demonstrated tensile testing of the wire.

  • Yasutake Ura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, “Tensile Testing of Fulleerene Nano Wire Using Electrostatic MEMS Device”, IEEE Transducers 2009, Denver
  • Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata, “Free-standing C60 nanowire fabricated using XeF2 sacrificial dry etching”, J.Micro/Nanolith. MEMS MOEMS, Jan-Mar 2009/Vol.8