The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017) will be in Las Vegas, Nevada, USA, from January 22-26, 2017. From Tabata Lab., one abstract has been accepted as a poster presentation.
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W. Zhang, A. Uesugi, Y. Hirai, T. Tsuchiya, and O. Tabata
TENSILE PROPERTIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC
