LaserExposure

mechCRwiki

レーザ直描露光装置

Heidelberg uPG101

Specification 仕様

Procedure 利用方法

Operation Training

  1. Contact Prof. R. Yokokawa to get a permission of usage.
  2. After approval from Prof. Yokokawa, get operation training from a super user.
  3. After operation training, e-mail to Prof. R. Yokokawa and Ms. K. Kawano.
  4. Your e-mail address will be included in the user mailing list.

Reservation

  1. Book the machine through Website.
  2. Use the machine.

Super Users

See SuperUsers Page!

Approved Users

★Yokokawa lab. 横川研究室
Ryuji Yokokawa, 横川 隆司(教員)
Kazuya fujimoto,藤本 和也(教員)
Ramin Banan(特定助教)
Kaori Kosugi,小杉 佳織(技術補佐員)
Yoshikazu Kameda, 亀田 良一(研究員)
Maneesha.shaji(D3)
Yuji Takata,高田 裕司(D3)
Ayumu tabuchi,田渕 史(D2)
Atsuya Kitada,北田 敦也(M2)
KOH WEI LUN DARRYL(M2)

★Tsuchiya lab. 土屋研究室
Toshiyuki Tsuchiya, 土屋 智由(教員)

★Nakabe lab. 中部研究室
Kazuya Tatsumi,巽 和也(教員)
Reiko Kuriyama, 栗山 怜子(教員)

★Hirayama lab. 平山研究室
Naoki Yamashita,山下 直輝(教員)

Machine Administrator

Ryuji Yokokawa

Photo

resource6.jpg