LaserExposure

mechCRwiki

レーザ直描露光装置

Heidelberg uPG101

Specification 仕様

Procedure 利用方法

Operation Training

  1. Contact Prof. R. Yokokawa to get a permission of usage.
  2. After approval from Prof. Yokokawa, get operation training from a super user.
  3. After operation training, e-mail to Prof. R. Yokokawa and Ms. K. Kawano.
  4. Your e-mail address will be included in the user mailing list.

Reservation

  1. Book the machine through Website.
  2. Use the machine.

Super Users

See SuperUsers Page!

Approved Users

★Yokokawa lab. 横川研究室
Ryuji Yokokawa, 横川 隆司(教員)
Kazuya fujimoto,藤本 和也(教員)
Ramin Banan(特定助教)
Mayumi Moriwaki, 森分 真由美(技術補佐員)
Kaori Kosugi,小杉 佳織(技術補佐員)
Yoshikazu Kameda, 亀田 良一(D2)
Du Qian(D1)~ Maneesha.shaji(D1)
Yuji Takata,高田 裕司(D1)
Ayumu tabuchi,田渕 史(M2)
Taiga Irisa,入佐 大河(M1)
Shozan Watabe,渡部 祥山(M1)
Atsuya Kitada,北田 敦也(B4)
KOH WEI LUN DARRYL(B4)

★Tsuchiya lab. 土屋研究室
Toshiyuki Tsuchiya, 土屋 智由(教員)

★Nakabe lab. 中部研究室
Kazuya Tatsumi,巽 和也(教員)
Reiko Kuriyama, 栗山 怜子(教員)

Machine Administrator

Ryuji Yokokawa

Photo

resource6.jpg