mechCRwiki

電子ビーム露光装置

TokyoTech L-5000
Nano-Platform Machine

Specification 仕様

Procedure 利用方法

Operation Training

  1. Contact Dr. Shintaku (shintaku@me.kyoto-u.ac.jp) to get a permission of usage.
  2. Get operation training.
  3. After operation training,e-mail to Dr. Shintaku and Ms. K. Kawano.

Reservation

  1. Book the machine through Website.
  2. Use the machine.

Super Users

Yuko Juri(3687)

Approved Users

Ryuji Yokokawa
Yoshikazu Hirai^ Hirofumi Shintaku^ Yuko Juri^ 大岡 正孝

Machine Administrator

Hirofumi Shintaku

Photo