論文/Paper

Journal / Int. Conf. / Dom. Meeting / Thesis

20242023202220212020201920182017201620152014201320122011201020092008200720052004-2003

2024

  1. Wei Yu, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Enhancing responsivity and detection limit in tunable NEMS resonator mass sensors
    Japanese Journal of Applied Physics, Vol. 63, No. 3 (2024) 03SP74.
    DOI: 10.35848/1347-4065/ad2979
  2. Tomoko Hirayama, Naoki Yamashita, Waka Yamamoto, Kenta Shirode, Akira Okada, Naoya Hatano, Toshiyuki Tsuchiya, Masako Yamada
    Adsorption Characteristics and Mechanical Responses of Lubricants Containing Polymer Additives under Fluid Lubrication with Narrow Gap
    Langmuir, published online (2024).
    DOI: 10.1021/acs.langmuir.3c03725

2023

  1. Dongxiao Zhang, Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata, and Toshiyuki Tsuchiya
    Microfabrication of polydimethylsiloxane–parylene hybrid microelectrode array integrated into a multi-organ-on-a-chip
    Japanese Journal of Applied Physics, Vol. 62, No.1 (2022), 017002.
    DOI: 10.35848/1347-4065/aca265
  2. Masaki Shimofuri, Amit Banerjee, Jun Hirotani, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Nanometer order separation control of large working area nanogap created by cleavage of single-crystal silicon along {111} planes using a MEMS device
    Journal of Microelectromechanical Systems, Vol. 32, Issue 1 (2023), pp. 67-73.
    DOI: 10.1109/JMEMS.2022.3213999
  3. Yuki Akura, Masaki Shimofuri, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Gap distance dependence on field emission at the nanogap between silicon cleavage surfaces
    Journal of Vacuum Science and Technology B, B 41, 022805 (2023)
    DOI: 10.1116/6.0002456
  4. Akane Nishimura, Hirohide Katsuta, Toshiyuki Tsuchiya, Yoshinori Takao
    Design and Fabrication of Ionic Liquid Electrospray Thruster with Two-Stage Electrodes
    Journal of Evolving Space Activities 1, 7 (2023).
    DOI: 10.57350/jesa.7
  5. Jiandong Yang, Yoshikazu Hirai, Kei Iida, Shinji Ito, Marika Trumm, Shiho Terada, Risako Sakai, Toshiyuki Tsuchiya, Osamu Tabata, Ken-ichiro Kamei
    Integrated gut-liver-on-a-chip platform as an in vitro human model of non-alcoholic fatty liver disease
    Communications Biology, 6, 310 (2023).
    DOI: 10.1038/s42003-023-04710-8
  6. Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani & Toshiyuki Tsuchiya
    Non-linear processing with a surface acoustic wave reservoir computer
    Microsystem Technologies,  29, 1197–1206 (2023)
    DOI: 10.1007/s00542-023-05463-4
  7. Claude Meffan, Julian Menges, Daniel Mak, Fabian Dolamore, Conan Fee, Volker Nock, Renwick C.J. Dobson
    A versatile capillaric circuits microfluidic viscometer
    Sensors and Actuators A: Physical, 359(1), 114497 (2023).
    DOI: 10.1016/j.sna.2023.114497
  8. Yuanlin Xia, Lei, Zhong, Jiaxing Tan, Zhuqing Wang, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Alternating a-C:H Coating Effect on Torsional Strength of Silicon Beam for Micromirrors
    Sensors and Actuators A: Physical 363, 114713 (2023).
    DOI: 10.1016/j.sna.2023.114713
  9. Masaki Shimofuri, Taishi Murakami, Shugo Miyake, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Numerical calculation of thermoreflectance coefficient of c-Si for wavelengths of 200–800 nm and temperatures of 300–500 K
    Japanese Journal of Applied Physics 62(11), 112006 (2023).
    DOI: 10.35848/1347-4065/ad07f8
  10. Wei Yu, Yuma Ohara, Claude Meffan, Jun Hirotani, Amit Banerjee, Toshiyuki Tsuchiya
    Achieving ultrawide tunability in monolithically fabricated Si nanoresonator devices
    Nano Letters 23(24), pp. 11517–11525 (2023).
    DOI: 10.1021/acs.nanolett.3c03164

2022

  1. Yuanlin Xia, Makoto Suzuki, Peidong Xue, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon
    International Journal of Fatigue, Vol. 162 (2022) 106983 (8pp).
    DOI: 10.1016/j.ijfatigue.2022.10698
  2. Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Ken-ichiro Kamei
    Gut-liver-axis microphysiological system for studying cellular fluidic shear stress and inter-tissue interaction
    Biomicrofluidcs, Vol. 16, (2022) 044113 (12pp).
    DOI: 10.1063/5.0088232
  3. Masaaki Tsukamoto,Hirokazu Terai,Madoka Tsumaya,Shigeru Kurosawa,Osamu Tsuji,Masashi Sato,Yoshiyuki Inoue,Keiko Kawano,Tomoaki Matsushima, Toshiyuki Tsuchiya
    Water vapor plasma-assisted low-temperature bonding of cyclo-olefin polymer for microchannel with integrated leak detector
    MRS Advances Vol. 7 (2022), pp. 905–910.
    DOI: 10.1557/s43580-022-00346-8

Review article

  1. Toshiyuki Tsuchiya
    Mechanical reliability of silicon microstructures
    Journal of Micromechanics and Microengineering, Vol. 32, No.1, 013003 (2022).
    [abstract]

2021

  1. Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Fracture behavior of Single-crystal Silicon Microstructure Coated with Stepwise Bias-graded a-C:H Film
    Surface and Coatings Technology, Vol. 405, 126559 (2021).
    [abstract]
  2. Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Microfabricated alkali metal vapor cells filled with an on-chip dispensing component
    Japanese Journal of Applied Physics, Vol. 60, SCCL01 (2021).
    [abstract]
  3. Fumiya Tachibana, Toshiyuki Tsuchiya, Yoshinori Takao
    Uniform needle-emitter arrays for ionic liquid electrospray thrusters with precise thrust control
    Japanese Journal of Applied Physics, Vol. 60, SCCL06 (2021).
    [abstract]
  4. Kazutaka Obitani, Kazutaka Araya, Masanori Yachi, Toshiyuki Tsuchiya
    Piezoelectric Disk Gyroscope Fabricated with Single-Crystal Lithium Niobate
    Journal of  Microelectromechanical Systems, Vol. 30, Issue 3, pp. 384-391 (2021).
    [abstract]
  5. 宮崎 貴史, 平井 義和, 亀井 謙一郎, 土屋 智由, 田畑 修
    経上皮電気抵抗測定の高精度化に向けたOrgan-on-a-Chipの設計法
    電気学会論文誌E(センサ・マイクロマシン部門誌), Vol. 141ーE, No. 7, pp. 237-244 (2021).
    [abstract]
  6. Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Effect of Alternating a-C:H Multilayer Full Coating on Fracture Behavior of Single-Crystal Silicon-Based Microstructure in Tensile and Toughness Tests
    Materials Science & Engineering: A, Vol. 827, 142054 (2021).
    [abstract]

2020

  1. QingYang You, Yingda Wang, Zhang Ziyao, Zhang Haijun, Toshiyuki Tsuchiya, Osamu Tabata
    Laser-Driven Optothermal Microactuator Operated in the Water
    Applied Optics, Vol. 59, Issue 6, pp. 1627-1632 (2020).
    [abstract]
  2. Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimers Created by Sacrificial DNA Origami Technique
    Micro & Nano Letters, Vol. 15, Issue 6, pp. 384-389 (2020).
    [abstract]
  3. Kenjiro Matsuki, Kenjiro Matsuki, Ryo Ohshima, Livio Leiva, Yuichiro Ando, Teruya Shinjo, Toshiyuki Tsuchiya, Masashi Shiraishi
    Spin transport in a lateral spin valve with a suspended Cu channel
    Scientific Reports, Vol. 10, art no. 10699 (2020).
    [abstract]
  4. 宮崎 貴史, 平井 義和, 亀井 謙一郎, 土屋 智由, 田畑 修
    マイクロ流体デバイス内の電流密度解析に基づいた経上皮電気抵抗測定用電極の設計法
    電気学会論文誌E(センサ・マイクロマシン部門誌), Vol. 140ーE, No. 10, pp.285-292 (2020).
    [abstract]
    (Translated Paper) Takashi Miyazaki, Yoshikazu Hirai, Ken‐ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Design strategy of electrode patterns based on finite element analysis in microfluidic device for Trans‐Epithelial Electrical Resistance (TEER) measurement
    Electron. Comm. Jpn., Vol. 104, Issue 2, e12296 (2021).
    [abstract]

2019

  1. Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film
    Sensors and Actuators A: Physical, Vol. 286, 2019, pp. 28-34.
    [abstract]
  2. 霜降真希, 平井義和, 土屋智由, 田畑修
    顕微ラマン分光を用いた単結晶シリコンへき開ナノギャップ間の温度差測定
    実験力学, Vol. 19, No. 1, 2019, pp.13-18.
    [abstract]
  3. 土屋智由, 鈴木淳也, 片岡達哉, 平井義和, 菅野公二, 田畑修
    単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測
    実験力学, Vol. 19, No. 1, 2019, pp.24-29.
    [abstract]
  4. 山下直輝, 朴 晟洙, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修
    AFMリソグラフィで作製したナノ領域へのDNAオリガミの特異的固定
    電気学会論文誌E(センサ・マイクロマシン部門誌), Vol. 139ーE, No. 5, 2019, pp. 95-102.
    [abstract]
  5. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
    Japanese Journal of Applied Physics, Vol. 58, No. SD, 2019, SDDL06.
    [abstract]
  6. Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Hangyeol Seo, Osamu Tabata, Toshiyuki Tsuchiya, Kenji Kitamura, Masahiro Tosa, Ivan Turkevych, Takehiko Kitamori
    Ferroelectric Extended Nanofluidic Channels for Room‐Temperature Microfuel Cells
    Adv. Mater. Technol. 2019, 1900252.
    [abstract]
  7. 呉家旭, 平井義和, 亀井謙一郎, 土屋智由, 田畑修
    心臓拍動を模倣する流体キャパシタを集積した肝臓オルガノイド作製用マイクロ流体デバイス
    電気学会論文誌E(センサ・マイクロマシン部門誌), Vol. 139-E, No. 7, 2019, pp.209-216.
    [abstract]
    (Translated Paper) Jiaxu Wu, Yoshikazu Hirai, Ken‐Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids
    Electron. Comm. Jpn., Vol. 102, 2019, pp.41-49
    [abstract]

2018

  1. Yusuke Shiomi, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    High-yield bridged assembly of ssDNA-modified SWCNT using dielectrophoresis
    International Journal of Automation Technology, Vol.12, No.1, 2018, pp. 29-36.
    [abstract]
  2. Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, and Osamu Tabata
    Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs
    Small, Vol.14, Issue.1, 2018, 1702028.
    [abstract]
  3. 宇野亜季子,平井義和,土屋智由,田畑修
    静電ピストンアレイ駆動型MEMS可変形状ミラーの数理解析モデル構築
    電気学会論文誌E(センサ・マイクロマシン部門誌),Vol.138-E, No.2, 2018, pp. 66-73.
    [abstract]
    (English Translation) Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata,
    Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array, Electrical Engineering in Japan.  Vol. 204, Issue 2, 2018, pp. 50-60.
    [abstract]
  4. Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film
    Applied Surface Science, Vol.443, 2018, pp.48-54.
    [abstract]
  5. Kazuma Emoto, Toshiyuki Tsuchiya, Yoshinori Takao
    Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters
    Transaction of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 16, Issue 2, 2018, pp. 110-115.
    [abstract]
  6. 稲垣達也, 朴晟洙, 山下直輝, 馬志鵬, 川合健太郎, 平井義和, 土屋智由, 田畑修
    リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明
    電気学会論文誌E(センサ・マイクロマシン部門誌),Vol.138-E, No.5, 2018, pp. 171-177.
    [abstract]
  7. Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
    Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device
    Applied Sciences, Vol. 8, Issue 6 (2018) 880.
    [abstract]
  8. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges
    Sensors and Materials, Vol. 30,  No.9(2), 2018, pp. 2143-2157.
    [abstract]

2017

  1. Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06GJ02.
    [abstract]
  2. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile test of a silicon microstructure fully coated with submicrometer-thick DLC film using PECVD method
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06GN01.
    [abstract]
  3. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06GF06.
    [abstract]
  4. Kaito Nakagawa, Toshiyuki Tsuchiya, Yoshinori Takao
    Microfabricated Emitter Array for an Ionic Liquid Electrospray Thruster
    Japanese Journal of Applied Physics, Vol. 56, 2017, 06GN18.
    [abstract]
  5. Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Integrated Heart/Cancer on a Chip to Reproduce the Side Effects of Anti-Cancer Drugs in vitro
    RSC Advances, Vol. 7, 2017, pp.36777-36786.
    [abstract]
  6. Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique
    Micro & Nano Letters, Vol. 12, Issue 11, November 2017, pp. 854-859.
    [abstract]

Special Issue Preface

  1. Toshiyuki Tsuchiya
    FOREWORD: Mircoporcesses and Nanotechnology
    Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 2017, 06G001.
    [Article]
  2. Toshiyuki Tsuchiya, Satoshi Konishi
    PREFACE: Special issue on transducers and micro-nano technology
    Journal of Micromechanics and Microengineering, Vol. 27, No.7, 2017, 070301.
    [Article]
  3. Toshiyuki Tsuchiya, Norihisa Miki, Satoyuki Kawano
    Guest Editorial – Special Issue
    Micro & Nano Letters, Vol. 12, Issue 8, 2017, page: 505.
    [Article]

2016

  1. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams
    Microsystem Technologies, Vol. 22, Issue 2, pp. 379-386, February 2016.
    [abstract]
  2. Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
    J. Microelectromechanical Systems, Vol.25, No.1, 2016, pp. 188-196.
    [abstract]
  3. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Effect of Localized Laser Treatment on Fatigue Performance of Single Crystal Silicon Microstructures
    Sensors and Materials, Vol. 28,  No.2, 2016,pp. 121-129.
    [abstract]
  4. Sahour Sayed, Mohammed Gamil, Ahmed Fath El-Bab, Koichi Nakamura, Toshiyuki Tsuchiya, Osamu Tabata, Ahmed Abd El-Moneim
    Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors
    Sensor Review, Vol. 36,  Issue.2, 2016,pp. 140-147.
    [abstract]
  5. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers
    Japanese Journal of Applied Physics, Vol. 55, 2016, 06GL04
    [abstract]
  6. 加藤義基, 平井義和, 亀井謙一郎, 土屋智由, 田畑修
    3次元微細加工を応用したBody on a Chip の開発
    IEEJ Trans. SM,Vol.136-E, No.6, 2016, pp.229-236.
    [abstract]
  7. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Investigation of the self-assembly process for discrete and polymerized bivalve DNA origami structures
    IEEJ Transactions on Electrical and Electronic Engineering, Vol. 11, 2016, pp. S164-S170
    [abstract]
  8. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Crystal-orientation dependent fatigue characteristics in micrometer-sized single-crystal silicon
    Microsystems & Nanoengineering, 2, Article number: 16027 (2016).
    [abstract]
  9. Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata
    Fracture behavior of single crystal silicon with thermal oxide layer
    Engineering Fracture Mechanics, Vol. 163,  pp. 523-532 (2016).
    [abstract]

2015

  1. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement
    Journal of Surface Engineered Materials and Advanced Technology, Vol.5, No.1, pp.28-41, 2015.
    [abstract] [pdf]
  2. Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata
    ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
    Sensors and Actuators B: Chemical, Vol.213, pp.547-557, 2015.
    [abstract]
  3. Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure
    Japanese Journal of Applied Physics, Vol.54, No.6S1, 06FP04, 2015.
    [abstract]
  4. Koji Sugano, Akihiro Nakata, Toshiyuki Tsuchiya, Osamu Tabata
    High-speed Pulsed Mixing in a Short Distance with High-frequency Switching of Pumping from Three Inlets
    Journal of Micromechanics and Microengineering, Vol.25, 084003.
    [abstract]
  5. Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata
    Direct Measurement of Transversely Isotropic DNA Nanotube by Force-Distance Curve-Based AFM
    Micro & Nano Letters, Volume 10, Issue 10, 2015, pp.513–517.
    [abstract]
  6. 菅野公二,平岡亮二,土屋智由,田畑修
    ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価
    IEEJ Trans. SM,Vol.135-E, No. 11, 2015, pp.433-438.
    [abstract]
  7. 菅野公二, 片山拓, 土屋智由, 田畑修
    高感度表面増強ラマン分光分析に向けた マイクロ流路内粒子凝集反応解析
    IEEJ Trans. SM, Vol.135-E, No. 11, 2015, pp.474-475.
    [abstract]
  8. Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata
    Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography
    J. Microelectromechanical Systems, Vol. 24, No. 6, 2015, pp.1856-1867.
    [abstract]
  9. Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from SOI wafers
    Micro & Nano Letters, Volume 10, Issue 12, 2015, pp.678–682.
    [abstract]

Books

  1. 肥後矢吉,谷川紘,鈴木健一郎,磯野吉正,荻博次,土屋智由,石山千恵美
    小さなものをつくるためのナノ/サブミクロン評価法
    コロナ社,2015
    [目次] [amazon]

解説

  1. 土屋 智由
    シリコンの機械的信頼性
    機械の研究, Vol.67, No.3, pp.183-190, 2015.
    [目次]

2014

  1. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Effects of etching surface roughness on the fatigue characteristics of single-crystal silicon
    IEEJ Trans. SM, Vol.134-E, No.2, pp. 32-37, 2014.
    [abstract]
  2. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Analytical investigation of the feasibility of sacrificial microchannel sealing for chip-scale atomic magnetometers
    Microsystem Technologies, Vol.20, No.3, pp.357-365, 2014.
    [abstract]
  3. Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators
    Microsystem Technologies, Vol.20, No.3, pp.403-411, 2014.
    [abstract]
  4. Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
    Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
    Japanese Journal of Applied Physics, Vol.53, No.6S, 06JM03, 2014.
    [abstract]
  5. Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes
    IEEJ Trans. SM, Vol.134-E, No.12, pp.392-399, 2014.
    [abstract]

2013

  1. Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro, Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
    Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependency on humidity
    Journal of Micromechanics and Microengineering, Vol.23, No.3, 035032, 2013.
    [abstract]
  2. Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
    (Translated from Denki Gakkai Ronbunshi, Vol.131-E, No.7, pp.251-257, 2011)
    Electronics and Communications in Japan, Vol.96, No.5, pp.58-66, 2013.
    [abstract]
  3. 平井義和, 柳生裕聖, 牧野圭秀, 上杉晃生, 菅野公二, 土屋智由, 田畑修
    MEMSネガレジストの粗視化分子動力学シミュレーション
    IEEJ Trans. SM, Vol.133-E, No.8, pp.320-329, 2013.
    [abstract]
  4. 上杉晃生,平井義和,菅野公二,土屋智由,田畑修
    (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響
    日本機械学会論文集A編,Vol.79, No.804, pp.1191-1200, 2013.
    [abstract]
  5. Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata
    On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet
    Journal of Micromechanics and Microengineering, Vol.23, No.11, 115003, 2013.
    [abstract]

2012

  1. 片岡達哉,平井義和,菅野公二,土屋智由,田畑修
    誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング
    IEEJ Trans. SM, Vol.132-E, No.5, pp.108-113, 2012.
    [abstract]
  2. Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata
    Electrostatic tensile testing device with nanonewton and nanometer resolution and its application to C60 nanowire testing
    Journal of Microelectromechanical Systems, Vol.21, No.3, pp.523-529, 2012.
    [abstract]
  3. Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying-Khai Teh, Ying-Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata
    Improved designs for an electrothermal in-plane microactuator
    Journal of Microelectromechanical Systems, Vol.21, No.3, pp.586-595, 2012.
    [abstract]
  4. Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Micromachined tactile sensor for soft-tissue compliance detection Journal of Microelectromechanical Systems, Vol.21, No.3, pp.635-645, 2012.
    [abstract]
  5. Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes
    Microsystem Technologies, Vol.18, No.6, pp.797-803, 2012.
    [abstract]
  6. 種村友貴, 山下秀一, 和戸弘幸, 竹内幸裕, 土屋智由, 田畑修
    多結晶シリコン薄膜の面外曲げ共振振動を用いたメンブレンの信頼性試験
    IEEJ Trans. SM, Vol.132-E, No.7, pp.224-229, 2012.
    [abstract]
  7. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Low-cycle to ultra-high-cycle fatigue lifetime measurement of single crystal silicon specimens using a microresonator test device
    Journal of Microelectromechanical Systems, Vol.21, No.4, pp.830-839, 2012.
    [abstract]
  8. 上杉晃生,平井義和,菅野公二,土屋智由,田畑修
    加工条件の異なる(110)単結晶シリコン薄膜の引張試験
    IEEJ Trans. SM,Vol.132-E, No.9, pp.320-321, 2012.
    [abstract] [direct link]
  9. Takashi Sumigawa, Kenta Matsumoto, Toshiyuki Tsuchiya, Takayuki Kitamura
    Fatigue of 1 μm-scale gold by vibration with reduced resonant frequency
    Materials Science and Engineering: A, Vol.556, pp. 429-436, 2012.
    [abstract]
  10. Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro, Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
    Fatigue testing of polycrystalline silicon thin-film membrane using out-of-plane bending vibration
    Japanese Journal of Applied Physics, Vol.51, No.11S, 11PA02, 2012.
    [abstract]
  11. Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
    Polymer, Vol.53, No.21, pp.4834-4842, 2012.
    [abstract]

Book chapter

  1. Toshiyuki Tsuchiya, HIroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
    Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
    S. Mir, C.-Y. Tsui; R. Reis, O. C. S. Choy, (Eds.) VLSI-SoC: The Advanced Research for Systems on Chip, Springer, Boston, pp. 94-109.
    [abstract]
  2. 佐藤一雄,土屋智由
    シリコンの破壊と疲労(第1編 第12章 3節)
    服部敏雄他編:破壊力学大系,エヌ・ティー・エス,東京,2012,pp.211-219.

2011

  1. 辻本和也,平井義和,菅野公二,土屋智由,田畑修
    チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術
    IEEJ Trans. SM, Vol.131-E, No.7, pp.251-257, 2011.
    [abstract]
  2. Wen-Ming Zhang, Osamu Tabata, Toshiyuki Tsuchiya, Guang Meng
    Noise-induced chaos in the electrostatically actuated
    MEMS resonators Physics Letters A, Vol. 375, No.32, pp.2903-2910, 2011.
    [abstract]
  3. Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata
    Fabrication of gold nanoparticle pattern using combination of self-assembly and two-step transfer
    Sensors and Materials, Vol.23, No.5, pp.263-275, 2011.
    [abstract]

2010

  1. Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata
    Tensile testing of single crystal silicon thin films at 600°C using IR heating
    Sensors and Materials, Vol.22, No.1, pp.1-12, 2010.
    [abstract]
  2. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Development of amplitude-controlled, parallel fatigue-test system for micro-electro-mechanical resonators
    Sensors and Materials, Vol.22 No.1, pp.39-50, 2010.
    [abstract]
  3. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens
    Micro & Nano Letters, Vol.5, No.1, pp.49-52, 2010.
    [abstract]
  4. Toshiyuki Tsuchiya, Yusuke Yamaji, Koji Sugano, Osamu Tabata
    Tensile and tensile-mode fatigue testing of microscale specimens in constant humidity environment
    Experimental Mechanics, Vol.50, No.4, pp.509-516, 2010.
    [abstract
  5. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    A three-dimensional microstructuring technique exploiting the positive photoresist property
    Journal of Micromechanics and Microengineering, Vol.20, No.6, 065005, 2010.
    [abstract]
  6. 菅野公二,内田雄喜,土屋智由,田畑修
    混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ
    IEEJ Trans. SM, Vol.130-E, No.7, pp.292-299, 2010.
    [abstract]
  7. 徳崎裕幸,平井義和,菅野公二,土屋智由,田畑修
    自己変位検出機能を有する面内2自由度静電櫛歯トランスデューサの等価回路
    IEEJ Trans. SM, Vol.130-E, No.9, pp.443-449, 2010.
    [abstract]
  8. Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist
    Journal of Microelectromechanical Systems, Vol.19, No.5, pp.1058-1069, 2010.
    [abstract]
  9. Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata
    Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system
    Microfluidics and Nanofluidics Vol.9 No.6, pp.1165-1174, 2010.
    [abstract]

Review article

  1. 土屋智由
    マイクロ・ナノ材料の試験方法 (連載講義:材料試験(13))
    塑性と加工(日本塑性加工学会誌), Vol.51, No.11, pp.1048-1052, 2010.

2009

  1. Toshiyuki Tsuchiya, Tomoya Jomori, Yasutake Ura, Koji Sugano, Osamu Tabata
    Free-standing C60 nanowire fabricated using XeF2 sacrificial dry etching
    Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol.8, No.1, 013020, 2009.
    [abstract]
  2. Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata
    Design and fabrication of a differential capacitive three-axis SOI accelerometer using vertical comb electrodes
    IEEJ Transactions on Electrical and Electronic Engineering, Vol.4, No.3, pp.345-351, 2009.
    [abstract]
  3. Nobuyo Fujiwara, Kazuo Asaumi, Yasuroh Iriye, Tomoyuki Koike, Toshiyuki Tsuchiya, Gen Hashiguchi Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit IEEJ Transactions on Electrical and Electronic Engineering, Vol.4, No.3, pp.352-357, 2009.
    [abstract]
  4. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    Effects of anisotropic elasticity on stress concentration in micromechanical structures fabricated on (001) single-crystal silicon flms
    Journal of Applied Physics, Vol.105, 093524, 2009.
    [abstract]
  5. Yuuki Nishimori, Hideta Ooiso, Shunsuke Mochizuki, Nobuyo Fujiwara, Toshiyuki Tsuchiya, Gen Hashiguchi
    A multiple degrees of freedom equivalent circuit for a comb-drive actuator
    Japanese Journal of Applied Physics, Vol.48, No.12R, 124504, 2009.
    [abstract]

2008

  1. 日下部達哉,種村友貴,樋口雄一,菅野公二,土屋智由,田畑修
    DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル
    粉体工学会誌, Vol.45, No.3, pp.156-161, 2008.
    [abstract]
  2. Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata and Toshiyuki Tsuchiya
    Mechanical calibration of MEMS springs with sub-micro-Newton force resolution
    Sensors and Actuators A: Physical, Vol.143, No.1, pp.136-142, 2008.
    [abstract]
  3. 吉川弥,篠部晃生,菅野公二,土屋智由,石田章,田畑修
    超小型触覚ディスプレイ用垂直駆動SMA薄膜アクチュエータの設計
    IEEJ Trans. SM, Vol.128-E, No.4, pp.151-160, 2008.
    [abstract]
  4. Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata
    Design of soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron
    IEEJ Transactions on Electrical and Electronic Engineering, Vol.3, No.3, pp.268-273, 2008.
    [abstract]
  5. Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam
    Design and simulation of a tactile sensor for soft-tissue
    IEEJ Trans. SM, Vol.128-E, No.5, pp.186-192, 2008.
    [abstract]
  6. Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara
    Air damping in a fan-shaped rotational resonator with comb electrodes
    IEEJ Trans. SM, Vol.128-E, No.5, pp.203-208, 2008.
    [abstract]
  7. Masaharu Komori, Hiroyuki Uchiyama, Hiromichi Takebe, Takahisa Kusuura, Kazutoshi Kobayashi, Hideyuki Kuwahara, Toshiyuki Tsuchiya
    Micro/nanoimprinting of glass under high temperature using CVD diamond mold
    Journal of Micromechanics and Microengineering, Vol.18, No.6, 065013, 2008.
    [abstract]
  8. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens
    Journal of Micromechanics and Microengineering, Vol.18, No.7, 075004, 2008.
    [abstract]

2007

  1. Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Moving mask UV lithography for three-dimensional structuring
    Journal of Micromechanics and Microengineering, Vol.17, No.2, pp.199-206, 2007.
    [abstarct]
  2. 樋口雄一,菅野公二,土屋智由,田畑修
    2種類の液滴の界面張力を用いた逐次積層セルフアセンブル
    IEEJ Trans. SM, Vol.127-E, No.4, pp.214-220, 2007.
    [abstract]
  3. Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer
    Journal of Microelectromechanical Systems, Vol.16, No.3, pp.746-752, 2007.
    [abstract]
  4. Tsuyoshi Ikehara, Toshiyuki Tsuchiya
    High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system
    IEICE Electronic Express, Vol.4, No.9, pp.288-293, 2007.
    [abstract]

2005

  1. Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba, Ryujiro Udo, Yuji Yoshitomi, Taeko Ando, Kazuo Sato, Kazuki Takashima, Yakichi Higo, Yasunori Saotome, Hirofumi Ogawa, Koichi Ozaki
    Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
    Journal of Microelectromechanical Systems, Vol.14, No.5, pp.1178-1186, 2005.
    [abstract]
  2. Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba
    Young’s modulus, fracture strain, and tensile strength of sputtered titanium thin films
    Thin Solid Films, Vol.484, No.1-2, pp.245-250, 2005.
    [abstract]
  3. Toshiyuki Tsuchiya
    Tensile testing of silicon thin films
    Fatigue & Fracture of Engineering Materials & Structures, Vol.28, No.8, pp.665-674, 2005.
    [abstract]

2004

  1. Toshiyuki Tsuchiya and Hirofumi Funabashi
    A z-axis differential capacitive SOI accelerometer with vertical comb electrodes
    Sensors and Actuators A: Physical, Vol. 116, No. 3, 378-383 (2004).
    DOI: 10.1016/j.sna.2004.05.008
  2. 中野 由崇, 土屋 智由, 坂田 二郎
    CVD法と熱処理で作製した多結晶Si膜の粒界物性評価
    電気学会論文誌E(センサマイクロマシン準部門誌), Vol. 124-E, No. 1, pp.14-20 (2004) .
    DOI: 10.1541/ieejsmas.124.14

2003

  1. 土屋智由, 船橋博文
    薄膜引張試験による多結晶シリコン膜のヤング率測定
    The Transaction E of The Institute of Electrical Engineering of Japan (電気学会E部門論文誌), Vol. 123, No. 12, pp.577-582 (2003).
    DOI: 10.1541/ieejsmas.123.577

2002

  1. Toshiyuki Tsuchiya, Mitsuhiro Shikida, and Kazuo Sato
    Tensile testing system for sub-micrometer thick films
    Sensors and Actuators A; Physical Vol. 97-98, 492-496 (2002)
    DOI: 10.1016/S0924-4247(01)00862-7
  2. Yasuyuki Kageyama, Yoshie Murase, Toshiyuki Tsuchiya, Hirofumi Funabashi, and Jiro Sakata
    Formation of porous grain boundaries in polycrystalline silicon thin films
    Journal of Applied Physics Vol. 91, No. 11, 9408-9413 (2002).
    DOI: 10.1063/1.1476088

2001

  1. Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, and Jiro Sakata
    Polysilicon Vibrating Gyroscope Vacuum-Encapsulated in an On-Chip Micro Chamber
    Sensors and Actuators A: Physical Vol. A90, No. 1-2, 49-55 (2001).
    DOI: 10.1016/S0924-4247(00)00565-3
  2. Toshiyuki Tsuchiya and Jiro Sakata
    Tensile testing of thin films using electrostatic force grip
    ASTM STP 1413: Mechanical Properties of Structural Films, 214-228 (2001).
    DOI: 10.1520/STP10991S
  3. D. A. LaVan, Toshiyuki Tsuchiya, G. Coles, W. G. Knauss, I. Chasotis, and D. Read
    Cross comparison of direct strength testing techniques on polysilicon films
    ASTM STP 1413: Mechanical Properties of Structural Films, 16-26 (2001).
    DOI: 10.1520/STP10977S

2000

  1. Yasuyuki Kageyama, Toshiyuki Tsuchiya, Hirofumi Funabashi, and Jiro Sakata
    Polycrystalline Silicon Thin Films with Hydrofluoric Acid Permeability for Underlying Oxide Etching and Vacuum Encapsulation
    Journal of Vacuum Science and Technology Vol. A18, No. 4, 1853-1858 (2000).
    DOI: 10.1116/1.582435
  2. Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, and Jiro Sakata
    Vibrating Gyroscope Consisting of Three Layers of Polysilicon Thin Films
    Sensors and Actuators A: Physical Vol. A82, No. 1-3, 114-119 (2000).
    DOI: 10.1016/S0924-4247(99)00371-4
  3. Tensile testing of insulating thin films; Humidity effect on tensile strength of SiO2 films
    Toshiyuki Tsuchiya, Atsuko Inoue, and Jiro Sakata
    Sensors and Actuators A; Physical Vol. A82, No.1-3, 286-290 (2000)
    DOI: 10.1016/S0924-4247(99)00363-5

1999

  1. 静電力チャックを用いた絶縁薄膜の引張試験
    土屋智由, 井上敦子, 坂田二郎
    電気学会E部門論文誌 Vol. 119-E, No. 5, 290-294 (1999)
    DOI: 10.1541/ieejsmas.119.290

1998

  1. Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata, Yasunori Taga
    Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
    Journal of Microelectromechinical Systems, Vol.7, No.1, pp.106-113, 1998.
    DOI: 10.1109/84.661392

1996

  1. Osamu Tabata, Toshiyuki Tsuchiya
    Poisson’s ratio evaluation of LPCVD silicon nitride film
    IEEJ Trans. SM, Vol.116-E, No.1, pp.34-35, 1996.
    [abstract]
  2. Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata, Yasunori Taga
    Tensile testing of polycrystalline silicon thin films using electrostatic force grip
    IEEJ Trans. SM, Vol.116-E, No.10, pp.441-446, 1996.
    [abstract]
  3. Toshiyuki Tsuchiya, Toshihiro Itoh, Gen Sasaki, and Tadatomo Suga
    Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel Processing
    Journal of the Ceramic Society of Japan Vol. 104、No. 3, 159-163 (1996)
    DOI: 10.2109/jcersj.104.159

2015年4月2日