Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliabi ...
Characterization of SWCNT with ssDNA
SWCNT (Single walled carbon nanotube) is known to have exceptional mechanical properties. However, t ...
Matrix sensitivity calibration for 3-axis accelerometer
Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as ve ...
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property ...
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mecha ...
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system i ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by ...