Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...
Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
ILEST with two-stage electrodes
We develop the ionic liquid electrospray thruster (ILEST) to ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
Flexible 3ω sensor
Thermal properties of fluids are needed when designing or ev ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
