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We have developed a microelectromechanical system (MEMS) to ...
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Recently, physical reservoir computing (PRC) has attracted a ...
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Thermionic generation generates electricity by collecting th ...
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MEMS technology provide us low cost, high functionality, sma ...
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Comparing with the mature SOI-based micro mirror resonator, ...
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Nano-scale mechanical resonator devices have emerged as prom ...
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In this research, we measured the local dynamic stress on Si ...
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MEMS gyroscopes for measuring rate or angle of rotation can ...
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We are developing thruster to be mounted on nanosatellite. E ...
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せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.
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シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
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MEMS (Micro Electro Mechanical System) devices are fabricate ...