MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to ...
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...
Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting th ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.
Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...