A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) has been proposed in order to decrease frequency splits (∆f) caused by anisotropic in-plane Young’s modulus (E) of (100) SCS and realize mode-matching in VRG. The FEA simulation demonstrated over x20 times decrease of ∆f due to anisotropic in-plane Young’s modulus after compensation, which was nearly mode-matched.
- Inertial measurement unit (IMU)
- Rockets guidance
- Shu, et al., “Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope,” Japanese Journal of Applied Physics, Vol. 58, No. SD, 2019, SDDL06. DOI: 10.7567/1347-4065/ab0dee