The 31st International Microprocesses and Nanotechnology Conference (MNC 2018) will be held at Sapporo, Japan, from 13-16 November, 2018. From Tabata lab., three paper will be presented in this conference.
14B-3-1: Microsystem Technology and MEMS II
Shu Yunyi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
15D-4-3: Microsystem Technology and MEMS III
Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Fracture Strength of a Silicon Torsional Mirror Resonator Fully Coated with Submicrometer-Thick PECVD DLC Film