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DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its ...

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In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...

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MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The devic ...

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MEMS gyroscopes for measuring rate or angle of rotation can be used to provide heading information f ...

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Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mir ...

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Vacuum nanogap electrodes are attracting attention because they can dramatically improve the thermal ...

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Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is n ...

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We developed a microelectromechanical system (MEMS) to fabricate nanogap electrodes of uniform gap-s ...