Inspection light of retinal observation is warped by distortion of eyeball. So deformable mirrors (DMs) to correct wave-front are widely utilized. We proposed a new DM, which generates large displacement. In this study, I confirm driving principle with fabricated device, and improve design with mathematical analysis model.
- Wave-front compensation element in the retinal observation
- Astronomical observation
A. Uno, V. K. Singh, Y. Hirai, T. Tsuchiya, O. Tabata, “Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array“, APCOT 2016, Japan, June 2016
A. Uno, Y. Hirai, T. Tsuchiya, O. Tabata, “MEMS Deformable Mirror Actuated By Electrostatic Piston Array”, Optical MEMS and Nanophotonics, Singapore, August 2016