Adaptive optics is a significant device that corrects the wavefront aberrations. This system is composed of deformable mirror, actuator, and wavefront sensor. MEMS deformable mirror device actuated by electromagnetic force is attractive for human eye testing because of low cost as well as high performance. We have successfully deformed 5 mm thick Si Mirror by electromagnetic force using a single micro-coil actuator. Peak stroke values of 3.88 and 15.5 mm on upward and downward directions are obtained, respectively at 0.6 A according to the direction of current. Deformed mirror surface is return to its original shape after turn off the current in both cases.
Optical wavefront compensation to increase the resolution of images.
- Retinal Imaging
- Astronomical Observation