MEMS device needs to be enhance its functionality by integration of a wide variety of nano-material such as metal nanoparticles, carbon nanotubes and so on. In our laboratory, as one of its approach, we propose a method for selective self-assembling on silicon substrate by DNA origami which has nano-material on its structure. Currently, in order to enhance its immobilization yield, we are trying to improve our proposal method.
- Optical waveguide
- One molecule detection sensor
- Y. Mori et al., “Selective assembly of DNA nanostructure bridging onto a trenched silicon substrate”, Transducers’15, Anchorage, AK (June, 2015).