In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscopy. In order to achieve time-resolved measurement of local dynamic stress, pulsed laser is needed as the incident laser. So we developed and evaluated MEMS optical chopper, which modulates CW laser, then achieved the time-resolved Raman stress measurement of Si resonator.
- Reliability evaluation of vibrating devices (e.g. Gyroscopes)
- Comparison of actual device with the result of fracture experiments
- “Doube-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy” Optical MEMS and Nanophotonics, 19 August 2014.