MEMS device for heat transfer measurement using nanogap

In recent years, nano-gap electrodes are reported to realize high efficient thermoelectric generators. To evaluate electrical and heat transfer properties in nano-gap, it is difficult to fabricate a large and uniform nanogaps by conventional fabrication methods. We propose a new device that make nano-gap consist of large and flat planes and measure heat transfer in the nano-gap by cleaving single crystal silicon with MEMS device.


  • investigation of flat and large nanogap planes
  • thermoionic generator