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Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’ ...

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In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscop ...

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MEMS capacitive accelerometers have been widely used for consumer and automobile applications. Our p ...

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Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in ha ...

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Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their op ...

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Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as ...

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Carbon nanotube (CNT) is expected to be applied to elements of nano devices because of its attractiv ...

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In recent years, nano-gap electrodes are reported to realize high efficient thermoelectric generator ...