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MEMS are often used in various products under vibrating environment. In order to improve the reliabi ...

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SWCNT (Single walled carbon nanotube) is known to have exceptional mechanical properties. However, t ...

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Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as ve ...

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Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property ...

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Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mecha ...

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Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system i ...

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We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by ...