Self-assembly process has been attracting much attention as a promising technique to integrate multiple functional small components with MEMS. Theme of study is constructing the theoretical model of self-assembly process which is crucial to optimize the self-assembly process parameters to get higher assembly yield. To verify the usability of the model, constructed the experimental system which can realize self assembly in millimeter and micrometer scale at first. Subsequently we constructed the model which express the systems. Then we compared the experimental result with analysis result of the model.
- T. Tanemura, et. al., Sequential and selective self-assembly of micro components by DNA grafted polymer, The 22nd IEEE International Conference on Micro Electro Mechanical Systems, Solent, Italy, Jan. 25-29, 2009, pp. 184-187